2009
DOI: 10.1016/j.scriptamat.2009.03.034
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A re-examination of the mechanism of thermosonic copper ball bonding on aluminium metallization pads

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Cited by 97 publications
(58 citation statements)
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“…Our latest study (Xu et al, 2009) showed that ultrasonic vibration partially fragmented the native oxide layer on the surface of the aluminium pad, and intermetallic compounds were formed in the area where the oxide layer was disintegrated. Thus, it is believed that micro-joints only exist in the microslip area -not in the stationary one.…”
Section: Bonding Model For Ultrasonic Energymentioning
confidence: 99%
See 1 more Smart Citation
“…Our latest study (Xu et al, 2009) showed that ultrasonic vibration partially fragmented the native oxide layer on the surface of the aluminium pad, and intermetallic compounds were formed in the area where the oxide layer was disintegrated. Thus, it is believed that micro-joints only exist in the microslip area -not in the stationary one.…”
Section: Bonding Model For Ultrasonic Energymentioning
confidence: 99%
“…Winchell and Berg (1978) and Xu et al (2009) highlighted that ultrasonic (US) vibration disrupted the contamination and oxide layer on the surface of the ball and the bond pad during wire bonding. In addition, Langenecker (1966) found that ultrasonic energy density required to produce deformation in aluminium was about 10 7 times less than that was required for the same deformation resulted from the thermal energy alone, therefore he pointed out that an ultrasonic energy could activate dislocations, and then soften and heat materials.…”
Section: Introductionmentioning
confidence: 99%
“…Based on our previous work, this very initial phase is CuAl 2 . 20 Previous studies of Au-Al bonds based on SEM and TEM observations revealed a 200-nm-to 500-nm-thick Au-Al IMC layer formed at the interface during the thermosonic bonding stage (175°C), 10,11 although the mechanism of formation of Au-Al IMCs within several milliseconds remains unclear. As for Cu-Al bonds, the above morphological analysis showed only approximately 30-nm-thick and discontinuous Cu-Al IMCs at the interface.…”
Section: Interfacial Morphology Of Cu-al Bonds In As-bonded Statementioning
confidence: 99%
“…In general, the mechanical strengthening of Al metal was usually achieved by the impurity doping of 0.5%-4% Cu [14,15]. Further studies on Al-Cu have reported that θ-Al 2 Cu is the first nucleus intermetallic compound [16]. Premkumar et al [15] added that this intermetallic becomes γ-Al 4 Cu 9 or η-AlCu as the purity of the Cu wire increases.…”
Section: Introductionmentioning
confidence: 99%