A real-time quantitative assessment of self-assembled quantum dots by reflection high-energy electron diffraction

Rajapaksha, C.; Freundlich, A.

doi:10.1016/j.mejo.2008.06.034

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2011

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“…iii : With this knowledge and the facet orientation determined from the corresponding angle between the RHEED chevrons [16] it is feasible to estimate the average size of the quantum dots real time, during growth. This method can be easily tailored to monitor the time evolution of the size of quantum dots during growth.…”

Section: Resultsmentioning

confidence: 99%

Real-time metrology of self assembled quantum dots by reflection high energy electron diffraction

Freundlich

Rajapaksha

2011

Quantum Dots and Nanostructures: Synthesis, Characterization, and Modeling VIII

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Based on atomistic analysis and kinematic diffraction theory, it has been previously predicted that quantum dot heights can be extracted from RHEED intensity profiles along the chevron tails (Feltrin A. and Freundlich A, J. Cryst. Growth 301-302, 38-41-2007). Here we report the existence of such periodic RHEED intensity fringes and demonstrate experimentally the possibility of monitoring real time the evolution of the average dot-size in the archetype InAs/GaAs system. The methodology when combined with RHEED information on the dot surface coverage and facet orientation is shown to provide a full metrology of self assembled quantum dots and could be valuable in assessing the QD growth kinetics and improving process reproducibility.

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Section: Resultsmentioning

confidence: 99%