Quantum Dots and Nanostructures: Synthesis, Characterization, and Modeling VIII 2011
DOI: 10.1117/12.875811
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Real-time metrology of self assembled quantum dots by reflection high energy electron diffraction

Abstract: Based on atomistic analysis and kinematic diffraction theory, it has been previously predicted that quantum dot heights can be extracted from RHEED intensity profiles along the chevron tails (Feltrin A. and Freundlich A, J. Cryst. Growth 301-302, 38-41-2007). Here we report the existence of such periodic RHEED intensity fringes and demonstrate experimentally the possibility of monitoring real time the evolution of the average dot-size in the archetype InAs/GaAs system. The methodology when combined with RHEED… Show more

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Cited by 2 publications
(4 citation statements)
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“…At 1.5ML InAs monolayer deposition RHEED pattern change from 2D to 3D at the onset of islands formation (Fig.3 (a)). Further deposition creates smaller quantum dots and numerous spectroscopic investigations establish that the InAs quantum dots are predominantly bounded by {137}A facets 7,8 which we also have confirmed in a separate study 6 . Due to the fact that there are no facets parallel to [1 -1 0] azimuth in such structures, no clear chevrons can be seen in the RHEED pattern as shown in fig 3(b).…”
Section: Application Of the Methodology To The Study Of Quantum Dot Fsupporting
confidence: 56%
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“…At 1.5ML InAs monolayer deposition RHEED pattern change from 2D to 3D at the onset of islands formation (Fig.3 (a)). Further deposition creates smaller quantum dots and numerous spectroscopic investigations establish that the InAs quantum dots are predominantly bounded by {137}A facets 7,8 which we also have confirmed in a separate study 6 . Due to the fact that there are no facets parallel to [1 -1 0] azimuth in such structures, no clear chevrons can be seen in the RHEED pattern as shown in fig 3(b).…”
Section: Application Of the Methodology To The Study Of Quantum Dot Fsupporting
confidence: 56%
“…Evolution of chevron angle along [1][2][3][4][5][6][7][8][9][10] azimuth is exhibited here as the growth proceeds in terms of InAs monolayers deposited at 440 0 C.…”
Section: Application Of the Methodology To The Study Of Quantum Dot Fmentioning
confidence: 99%
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