A reel-to-reel compatible printed accelerometer

Klejwa, N.; Hennessy, R.G.; Chen, J.-W.P.; Howe, Roger T.

doi:10.1109/transducers.2011.5969203

Cited by 4 publications

(2 citation statements)

References 9 publications

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“…MEMS-based accelerometers have many attractive attributes, such as a tiny footprint, high sensitivity, low power consumption, high reliability, and multiple functionalities. However, future advances will be limited by drawbacks of complex, expensive, and time-consuming fabrication processes . Moreover, these processes are limited by the 2D planar dimensionality of the microfabrication processes, are not flexible, and cannot be easily customized or modified with new designs.…”

Section: Introductionmentioning

confidence: 99%

“…However, future advances will be limited by drawbacks of complex, expensive, and time-consuming fabrication processes. 12 Moreover, these processes are limited by the 2D planar dimensionality of the microfabrication processes, are not flexible, and cannot be easily customized or modified with new designs. The established micromachining techniques lack the ability to easily fabricate complex three-dimensional structures and have limited compatibility with unconventional flexible substrates and non-solid-state proof masses.…”

Section: ■ Introductionmentioning

confidence: 99%

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Acceleration Sensors: Sensing Mechanisms, Emerging Fabrication Strategies, Materials, and Applications

Babatain

Bhattacharjee

Hussain

et al. 2021

ACS Appl. Electron. Mater.

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Accelerometers are among the most mature sensor technologies with a broad range of applications in multiple fields and industries. They represent the most widely used microelectromechanical system (MEMS) devices with excellent and reliable performance. MEMS acceleration sensors established dominance mainly in navigation and control applications. In recent years, however, recent technologies and materials have emerged that introduce novel sensing mechanisms, improve performance, enable customization, reduce cost, and reduce fabrication complexity. Herein, the recent advances in accelerometers based on MEMS and recent emerging technologies are reviewed. This work provides a comprehensive review of accelerometers' sensing mechanisms and the main characteristics and features of each type of sensor, material, and fabrication strategies used to fabricate them. From the aspect of sensor application, this work focuses on reviewing applications that demonstrate the use of accelerometers manufactured using unconventional technologies and materials in prevailing fields such as healthcare monitoring, automotive industry, navigation, building, and structural monitoring. Moreover, challenges and future efforts needed to be addressed in this field are summarized.

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Section: Introductionmentioning

confidence: 99%

Section: ■ Introductionmentioning

confidence: 99%

Acceleration Sensors: Sensing Mechanisms, Emerging Fabrication Strategies, Materials, and Applications

Babatain

Bhattacharjee

Hussain

et al. 2021

ACS Appl. Electron. Mater.

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A Review on Surface Stress-Based Miniaturized Piezoresistive SU-8 Polymeric Cantilever Sensors

Mathew

Sankar

2018

Nano-Micro Lett.

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In the last decade, microelectromechanical systems (MEMS) SU-8 polymeric cantilevers with piezoresistive readout combined with the advances in molecular recognition techniques have found versatile applications, especially in the field of chemical and biological sensing. Compared to conventional solid-state semiconductor-based piezoresistive cantilever sensors, SU-8 polymeric cantilevers have advantages in terms of better sensitivity along with reduced material and fabrication cost. In recent times, numerous researchers have investigated their potential as a sensing platform due to high performance-to-cost ratio of SU-8 polymer-based cantilever sensors. In this article, we critically review the design, fabrication, and performance aspects of surface stress-based piezoresistive SU-8 polymeric cantilever sensors. The evolution of surface stress-based piezoresistive cantilever sensors from solid-state semiconductor materials to polymers, especially SU-8 polymer, is discussed in detail. Theoretical principles of surface stress generation and their application in cantilever sensing technology are also devised. Variants of SU-8 polymeric cantilevers with different composition of materials in cantilever stacks are explained. Furthermore, the interdependence of the material selection, geometrical design parameters, and fabrication process of piezoresistive SU-8 polymeric cantilever sensors and their cumulative impact on the sensor response are also explained in detail. In addition to the design-, fabrication-, and performance-related factors, this article also describes various challenges in engineering SU-8 polymeric cantilevers as a universal sensing platform such as temperature and moisture vulnerability. This review article would serve as a guideline for researchers to understand specifics and functionality of surface stress-based piezoresistive SU-8 cantilever sensors.

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Capacitive accelerometer laboratory using polymer-film rapid prototyping technology

Gellineau

Rastegar

Howe

2013

2013 3rd Interdisciplinary Engineering Design Education Conference

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A reel-to-reel compatible printed accelerometer

Cited by 4 publications

References 9 publications

Acceleration Sensors: Sensing Mechanisms, Emerging Fabrication Strategies, Materials, and Applications

Acceleration Sensors: Sensing Mechanisms, Emerging Fabrication Strategies, Materials, and Applications

A Review on Surface Stress-Based Miniaturized Piezoresistive SU-8 Polymeric Cantilever Sensors

Capacitive accelerometer laboratory using polymer-film rapid prototyping technology

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