A Reliable Liquid-Based Highly Sensitive Micro Thermoresistive Convective Accelerometer by Using $0.35 \mu \mathrm{M}$ CMOS MEMS Technology

Wang, Xiaoyi; Xu, Wei; Lim, Gyuha; Lee, Yi-Kuen

doi:10.1109/mems46641.2020.9056154

Cited by 3 publications

(3 citation statements)

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Section: Conventional Mems Acceleration Sensorsmentioning

confidence: 99%

“…Compensation detectors were used on master detectors to detect acceleration and the cross-sensitivity was reduced to 2% from 15%, Figure b shows the microimage of the device . Another Rayleigh number based thermoresistive accelerometer was reported using liquid; Figure c shows the micrograph of the device …”

Section: Conventional Mems Acceleration Sensorsmentioning

confidence: 99%

“…63 Another Rayleigh number based thermoresistive accelerometer was reported using liquid; Figure 7c shows the micrograph of the device. 64 A three-axial thermal accelerometer was reported with a fivewire structure by Li et al With planar staking method, five wire structures perpendicular to each other were fabricated. The sensitivities in the orthogonal directions were reported to be 16.1 and 18.4 mV/g; the picture of the sensor is shown in Figure 7d.…”

Section: ■ Conventional Mems Acceleration Sensorsmentioning

confidence: 99%

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Acceleration Sensors: Sensing Mechanisms, Emerging Fabrication Strategies, Materials, and Applications

Babatain

Bhattacharjee

Hussain

et al. 2021

ACS Appl. Electron. Mater.

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Accelerometers are among the most mature sensor technologies with a broad range of applications in multiple fields and industries. They represent the most widely used microelectromechanical system (MEMS) devices with excellent and reliable performance. MEMS acceleration sensors established dominance mainly in navigation and control applications. In recent years, however, recent technologies and materials have emerged that introduce novel sensing mechanisms, improve performance, enable customization, reduce cost, and reduce fabrication complexity. Herein, the recent advances in accelerometers based on MEMS and recent emerging technologies are reviewed. This work provides a comprehensive review of accelerometers' sensing mechanisms and the main characteristics and features of each type of sensor, material, and fabrication strategies used to fabricate them. From the aspect of sensor application, this work focuses on reviewing applications that demonstrate the use of accelerometers manufactured using unconventional technologies and materials in prevailing fields such as healthcare monitoring, automotive industry, navigation, building, and structural monitoring. Moreover, challenges and future efforts needed to be addressed in this field are summarized.

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Section: Conventional Mems Acceleration Sensorsmentioning

confidence: 99%

Section: Conventional Mems Acceleration Sensorsmentioning

confidence: 99%