A Resonant Graphene NEMS Vibrometer

Abstract

Measuring vibrations is essential to ensuring building structural safety and machine stability. Predictive maintenance is a central internet of things (IoT) application within the new industrial revolution, where sustainability and performance increase over time are going to be paramount. To reduce the footprint and cost of vibration sensors while improving their performance, new sensor concepts are needed. Here, double‐layer graphene membranes are utilized with a suspended silicon proof demonstrating their operation as resonant vibration sensors that show outstanding performance for a given footprint and proof mass. The unveiled sensing effect is based on resonant transduction and has important implications for experimental studies involving thin nano and micro mechanical resonators that are excited by an external shaker.

Resonant Transducers Consisting of Graphene Ribbons with Attached Proof Masses for NEMS Sensors

“…This expected nonlinear behavior is what we call geometric nonlinearity associated with the mode shape and motion, and it is always hardening, meaning that the Duffing coefficient α > 0. For the case of graphene, or other 2D resonators, it has been reported repeatedly in the past. ,,,, For our type of devices (with a Si mass in the center) but without ribbons, we have also shown this in the past . What makes our two-ribbon devices special is that their nonlinear behavior is softening, meaning α < 0.…”

“…The earliest studied graphene NEMS devices were resonators that consisted of double-sided clamped single-layer graphene ribbons suspended over trenches in a SiO 2 layer, where their mechanical properties such as fundamental resonance frequencies and quality factors were characterized at room temperature. 4 Subsequently, different types of resonant structures 5−30 based on suspended graphene without an attached mass were studied for the basic properties of graphene 7−9,11−13,15,17−20,23,24,26−28 and for device applications such as ultrasensitive detection of gases, 16 temperature, 10 pressure, 29 mass, 15 vibrations, 5,31 and for applications in fire warning 32 and infrared spectroscopy. 14 The resonance frequency of graphene resonators was theoretically and experimentally demonstrated to be influenced by a change in the tension of the suspended graphene that can be caused, for example, by applied electrostatic voltages, 33−36 temperature, 10,37 mass, 37,38 thermal shrinkage of SU-8 resist anchors, 39 nanoindentation forces, 40 and external accelerations.…”

“…The earliest studied graphene NEMS devices were resonators that consisted of double-sided clamped single-layer graphene ribbons suspended over trenches in a SiO 2 layer, where their mechanical properties such as fundamental resonance frequencies and quality factors were characterized at room temperature . Subsequently, different types of resonant structures − based on suspended graphene without an attached mass were studied for the basic properties of graphene − ,− ,,− ,,,− and for device applications such as ultrasensitive detection of gases, temperature, pressure, mass, vibrations, , and for applications in fire warning and infrared spectroscopy …”

Applications of Graphene in Five Senses, Nervous System, and Artificial Muscles

“…NEMS processed cantilevers show trace gas sensing with resolution to single atom by the chemisorption induced resonance-frequency deviation. Graphene vibrometer can measure vibration of buildings for Internet of Things applications . Thermogravimetric analysis on a NEMS processed cantilever can detect nanogram samples and single particle, which can be integrated with a TEM system for in situ analysis of single gas molecule .…”

“…Graphene vibrometer can measure vibration of buildings for Internet of Things applications. 238 Thermogravimetric analysis on a NEMS processed cantilever can detect nanogram samples and single particle, 239 which can be integrated with a TEM system for in situ analysis of single gas molecule. 240 Besides, graphene based microfiber resonators can detect single molecule with selectivity.…”