A resonant pressure MEMS sensor based on levitation force excitation detection

Zamanzadeh, Mohammadreza; Jafarsadeghi-Pournaki, Ilgar; Ouakad, Hassen M.

doi:10.1007/s11071-020-05579-6

Cited by 24 publications

(14 citation statements)

References 47 publications

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“…In particular, MEMS/NEMS sensors need to identify parameter changes in their surroundings and deliver information by measuring the changes in mechanical, magnetic, chemical, optical, acoustic, or thermal information. In many MEMS applications, such as sensors (Patocka et al., 2019; Zamanzadeh et al., 2020) and switch (Qian et al., 2017), the measured physical fields are regarded as external load. Exciting sensors or switches with internal moving structures that make their conductors come into contact to generate signal reception and corresponding information feedback (Nastro et al., 2020).…”

Section: Introductionmentioning

confidence: 99%

Analysis of thermo-mechanical coupling damage behavior in long-term performance of microelectromechanical systems actuators

Jia-xing

2021

International Journal of Damage Mechanics

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Effective numerical analysis is significant for the optimal design and reliability evaluation of MEMS, but the complexity of multi-physical field couplings and irreversible damage accumulation in long-term performance make the analysis difficult. In the present paper, the continuum damage mechanics method is used to develop a creep damage model and conduct long-term performance analysis for MEMS thermal actuators with coupled thermo-mechanical damage behavior. The developed damage model can make a connection between the material deterioration due to microstructure changes and the macroscopic responses (the change of thermo-mechanical performance or structure failure). The numerical simulations of coupled thermo-mechanical behavior in long-term performance are implemented using the finite element method, which is validated through comparison with previous literature. The numerical results demonstrate that the proposed damage model and numerical method can provide effective assessment in the long-term performance of MEMS thermal actuators.

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Section: Introductionmentioning

confidence: 99%

Analysis of thermo-mechanical coupling damage behavior in long-term performance of microelectromechanical systems actuators

Jia-xing

2021

International Journal of Damage Mechanics

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“…The upward electric force in this pull-in free structure is generated via a special arrangement by adding two lateral substrates and applying the same voltage to these side units while the middle unit is grounded [1,2]. This innovative design owns numerous advantages as compared to the classical parallel-plates counterpart, such as the possibility of bouncing back [3] rather than experiencing a pull-in instability (micro-stiction, short circuit) [4][5][6][7], the double-side tunability [8] against mere mono-side tunability with increasing frequency shift, pairability with parallel plate [9] for releasing the latched micro-beam, a higher resolution and broader range for pressure/mass detection [10] and better durability with more reliable performance for switch application [11]. In almost all of the literature concerning levitation force MEMS layout, one mode assumption has been used to simplify the derivation of the governing equation of motion.…”

Section: Introductionmentioning

confidence: 99%

Modal Interaction in a Levitation Force MEMS Based Resonator

Zamanzadeh

Meijer

Jafarsadeghi-Pournaki

et al. 2021

Volume 7B: Dynamics, Vibration, and Control

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This work aims to examine the possibility of internal resonances (modal interactions) among the vibration modes of a levitation force Micro-electro-mechanical Systems (MEMS) based resonator. The actuating levitation force is generated through a special arrangement consisting of two stationary side electrodes (both electrically charged) and a middle grounded unit consisting of the stationary electrode located beneath a moving electrode (micro-beam). Both “cantilever” (CL) and “clamped-clamped” (CC) microbeams are analysed as the moving element of this especial design in which the applied voltage pushes away the micro beam from the underneath substrate. All possible commensurable relations between the frequencies are inspected. We use the numerical bifurcation toolbox MatCont to capture the computed frequency response branches and examine their stability. A period-doubling bifurcation for the possible onset of chaotic attractors is inspected as well. A preliminary eigenvalue problem analysis suggests the internal resonance may exist in both (CC and CL) cases. However, an extended dynamical analysis shows that just a 3-to-1 modal interaction (between the first and third modes) in the CC arrangement is possible. The effects of dominant force-related terms are plotted through associated plots. These diagrams demonstrated that this design exhibits a rich internal resonance behavior that can be controlled with different geometrical and actuating parameters. Overall, this effort provides a systematic methodology and simple guidelines for indepth exploration of internal resonances in levitation force-based microbeams. The outcomes of this work could also assist in the development of MEMS sensors based on the internal resonance phenomenon.

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“…Microelectromechanical system (MEMS) based curved micro-beams are attracting substantial interests for actuating and sensing applications, owing to their high sensitivities, high resolution, low power consumption, high performance, and light weight [1][2][3][4][5]. Among the various actuation methods, electrostatic and electrothermal actuations are the two most effective mechanisms for achieving in-plane motion.…”

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confidence: 99%

“…Various shapes of curved micro-beams have been used to generate inplane motions, such as Arc-shaped [14], Cosine-shaped [15][16][17][18], and V-shaped [16]. The pull-in and bi-stable behaviors of the in-plane Arches micro-beams (Arc-and Cosine-shaped) have been widely studied and investigated for various applications, such as micro-switches, filtering, microvalves, logics, mechanical memories, pressure sensors, and energy harvesting [3,20,21]. Also, the arch micro-resonators have received considerable attention in the literature to examine their static and dynamic behaviors [22].…”

mentioning

confidence: 99%

“…In previous works, experimental and analytical investigations were presented for the static and dynamic behavior of arches micro-resonators under electrostatic actuation and electrothermal actuation (compressive axial forces) [15]. In [3], the possibilities of mode veering and crossing were examined and application for pressure sensors was proposed. Also, the static and dynamics of V-shaped micro-resonators under electrothermal excitation have been investigated in [25].…”

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confidence: 99%

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Statics and Dynamics of V-Shaped Microbeams Under Axial Forces

Ouakad

Alcheikh

Mbarek

et al. 2021

Journal of Computational and Nonlinear Dynamics

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We present an investigation into the static and dynamic behaviors of electrostatically actuated in-plane micro-electro-mechanical V-shaped micro-beam under axial loads. The micro-beams are actuated with two separate electrodes of uniform air-gap across their length. The effects of the initial rise and DC bias voltage are examined while varying the axial loads ranging from compressive to tensile. The numerical analysis is based on a nonlinear equation of motion of a shallow V-shaped micro-beam. The static equation is solved using a reduced-order model based on the Galerkin procedure. Then, the eigenvalue problem of the structure is solved for various equilibrium positions. The analytical model is validated by comparing to an experimental case study. The results show rich and diverse static and dynamic behavior. It is shown that the micro-beam may exhibit only pull-in or snap-through and pull-in instabilities. Various multi-state and hysterics behaviors are demonstrated when varying the actuation forces and the initial rise. High tunability is demonstrated when varying the axial and DC loads for the first two symmetric vibration modes. Such rich behavior can be very useful for high performance micro-scale applications designs.

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A resonant pressure MEMS sensor based on levitation force excitation detection

Cited by 24 publications

References 47 publications

Analysis of thermo-mechanical coupling damage behavior in long-term performance of microelectromechanical systems actuators

Analysis of thermo-mechanical coupling damage behavior in long-term performance of microelectromechanical systems actuators

Modal Interaction in a Levitation Force MEMS Based Resonator

Statics and Dynamics of V-Shaped Microbeams Under Axial Forces

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