A Review of Actuation and Sensing Mechanisms in MEMS-Based Sensor Devices

Algamili, Abdullah Saleh; Khir, M. H. Md; Dennis, John Ojur; Ahmed, A. Y.; Alabsi, Sami Sultan; Hashwan, Saeed S. Ba; Junaid, Mohammed M.

doi:10.1186/s11671-021-03481-7

Cited by 230 publications

(90 citation statements)

References 141 publications

(231 reference statements)

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“…Piezoelectric actuation could be a potential direction going forward to enable continuous and bi-directional reconfigurability for THz MEMS metadevices but will have limited tunable range and requires complex processing. [25] Additionally, the nonuniformity of the cantielvers in the fabricated metadevice and stiction issue, limits the switching speed and reliability of the farbicated MEMS CESRR metadevice. Detailed co-optimization across THz metasurface design, MEMS actuator design and fabrication process can enable MEMS THz CESRR metadevice with microsecond switching time with enhanced reliability.…”

Section: Resultsmentioning

confidence: 99%

Electromechanically Tunable Frequency‐agile Metamaterial Bandpass Filters for Terahertz Waves

Pitchappa

Kumar

Singh

et al. 2021

Advanced Optical Materials

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great promise for strong interaction and enhanced manipulation of THz waves. [2] Metamaterial is an array of subwavelength unit cell structures, whose electromagnetic properties can be designed through unit cell geometrical shape and size. Metamaterials are functionally versatile, spectrally scalable, and extremely thin and lightweight. Further, the properties of the metamaterials can be dynamically varied, either by incorporating active material within the unit cell or through structural reconfiguration of unit cell by integrating microelectromechanical systems (MEMS)-based actuator. These metamaterials with dynamically reconfigurable properties are popularly termed as "THz metadevices." [3] A wide range of active ?THz metadevices have been reported for varied THz functionalities including amplitude modulation, [4] frequency tuning, [5] polarization switching, [6] phase control, [7] tunable group-delay, [8] and dynamic beam steering. [9] However, the realization of one of the most important functional devicesthe tunable bandpass transmission filter has remained elusive. Tunable transmission filters are essential for wide array of compact THz systems including miniaturized spectrometers, hyperspectral imagers and channel selectors in next generation high-speed wireless communication systems. Even though, broadband THz filters can be utilized for certain THz applications, instead of tunable narrowband filters, for the aforementioned applications, narrowband filtering response with spectral tunability is essential. [10] Most of the earlier reports on conventional metadevice-based tunable transmission filters are of band-stop type. [5,11] Alternatively, active control of bandpass transmission filters have also been reported by integrating active materials with complementary metamaterials. [12] Various approaches reported for active control THz transmission filters through integration with complementary metamaterials, include electrical control of depletion region in Schottky diode, [13] electrical gating of graphene, [14] thermal control of superconducting hole array, [15] elemental doping of Si, [16] photodoping of semiconductors, [17] and phase transition materials. [18] However, these approaches provide modulation of transmission amplitude at a specific frequency, rather than the desired spectral shift of the transmission peak. The demonstration of spectrally tunable THz metadevice is still lacking, mainly due the unavailability of natural material with large tunable refractive index at THz frequencies. Alternatively, spectrally tunable THz transmission filters have been reported using Fabry-Perot cavities and near-field coupled metallic grid lines and Tunable terahertz (THz) transmission filters are essential for various key applications including miniaturized spectrometers, hyperspectral imagers, and channel selectors in high-speed wireless communication systems. However, tunable THz transmission filters have remained elusive, so far. Here, an electromechanically reconfigurable microcantilevers integra...

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Section: Resultsmentioning

confidence: 99%

Electromechanically Tunable Frequency‐agile Metamaterial Bandpass Filters for Terahertz Waves

Pitchappa

Kumar

Singh

et al. 2021

Advanced Optical Materials

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“…Several attempts to improve membrane characteristics are related to the development of composite materials based on polymers [79], [80]. Electromagnetic actuators operating principle is based on magnetic interaction force between the permanent magnet and the electromagnetic field generated in conductive material [81]. Typically electromagnetic actuators consist of a stationary coil and movable magnet placed in the coil-generated electric field [82], but the design with stationary mounted permanent magnets and movable coils is also reported [81].…”

Section: Electromagnetic Actuatorsmentioning

confidence: 99%

Robotic micromanipulation: a) actuators and their application

Bučinskas¹,

Subačiūtė-Žemaitienė²,

Dzedzickis³

et al. 2021

Robot. syst., appl.

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Development of biotechnology and technologies related to small size object position and placement in working area, ensuring desired orientation and fitting during movement into prescribed positions. Paper provides an effort to classify and provide a sorted list of applications in the variety of existing robotic systems to manipulate the object of micrometric size. Extensive development of robotic systems fosters intensive request of accurate and fast drives for robots and manipulators. Paper overviews and specifies a broad spectrum of micrometric scale drives, operating under certain physical effects. These drives are analyzed according to their physical domain, movement mode, stroke or angle range, generated force, speed of movement and other essential drive parameters. The paper concludes a high potential of drives development and points direction to future their application possibilities in microrobotics.

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“…Motors have excellent feasibility in robots due to their low power consumption and superior performance. [35] A bio-inspired origami crawling robot was manufactured based on the Kresling crease pattern (CP). [36] To prevent twisting of the structure and enforce straight motion, the two origami towers are designed with opposite chirality.…”

Section: Motors Actuationmentioning

confidence: 99%

Miniaturized Origami Robots: Actuation Approaches and Potential Applications

Tang

Wei

2021

Macro Materials & Eng

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Origami, a paper folding art, has inspired engineering applications in various fields for decades. It provides a simple approach to realize the transformation between simple 2D composite sheets and complex 3D functional structures. By integrating the origami concept with smart materials, a number of advanced origami robots have been developed with self-deploying and programming capacities to respond to external environment stimuli. At present, miniaturized origami robots have demonstrated advantages in many-profile applications, including bio-inspired robotics, biomedical engineering, and environment monitoring. However, how to properly drive origami robots is a big challenge. In this paper, the investigation and analyses of the previous literature focus on the various actuations of miniaturized origami robots, including the magnetic, light, electric, swelling, motors, thermal, and other actuation methods. Finally, the article investigates applications of actuation methods for miniaturized origami robots with various functions, and discusses the challenges and opportunities in future applications.

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A Review of Actuation and Sensing Mechanisms in MEMS-Based Sensor Devices

Cited by 230 publications

References 141 publications

Electromechanically Tunable Frequency‐agile Metamaterial Bandpass Filters for Terahertz Waves

Electromechanically Tunable Frequency‐agile Metamaterial Bandpass Filters for Terahertz Waves

Robotic micromanipulation: a) actuators and their application

Miniaturized Origami Robots: Actuation Approaches and Potential Applications

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