A Review of Capabilities and Scope for Hybrid Integration Offered by Silicon-Nitride-Based Photonic Integrated Circuits

Gardes, Frederic Y.; Shooa, Afrooz; Paoli, Greta De; Skandalos, Ilias; Ilie, S. T.; Rutirawut, Teerapat; Talataisong, Wanvisa; Faneca, Joaquín; Vitali, Valerio; Hou, Yaonan; Bucio, Thalía Domínguez; Zeimpekis, Ioannis; Lacava, Cosimo; Petropoulos, P.

doi:10.3390/s22114227

Cited by 41 publications

(16 citation statements)

References 300 publications

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“…Loss reduction is one of the most essential and emergent issues that should be tackled in photonic integrated circuits (PICs). Due to its low-loss property and transparency across a broad wavelength range (400-2350nm), silicon nitride (Si3N4) has been considered as a promising platform [1][2][3][4][5]. It has been widely used in communication [6], sensing [7], computation [8] and quantum physics [9].…”

Section: Introductionmentioning

confidence: 99%

High-Efficiency focusing grating coupler with distributed Bragg reflector

WEI¹,

Zhang²,

Li³

et al. 2023

Preprint

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We propose a high-efficiency silicon nitride focusing grating coupler with a bottom reflector. The bottom reflector consists of a distributed Bragg reflector (DBR) with a stack of Si3N4 and SiO2 layers. Moreover, the taperless structure of focusing grating couplers is utilized to further increase the density of integration. The result shows that the reflectivity of the grating coupler with 8-layer DBR reaches 98% at 1550nm, the peak coupling efficiency (CE) is -2.1dB and the 1dB bandwidth is 66nm. Compared to the focusing grating without DBR, the CE is improved by 1.87 dB with slight change in 1dB bandwidth, and the footprint is only 27.1×37.1μm^2.

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Section: Introductionmentioning

confidence: 99%

High-Efficiency focusing grating coupler with distributed Bragg reflector

WEI¹,

Zhang²,

Li³

et al. 2023

Preprint

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“…6 Silicon nitride (SiNx) is gaining ground as a CMOS fab material of low-losses and high fabrication tolerances, important for (de-)multiplexing applications. 7 Its low-temperature (350 • C) growth capability 8 provides a backend-of-line integration to active devices, by building defect-free layers of the same order of size, setting the ground for a SiNx-based passive circuitry and/or a pathway to SOI waveguides.…”

Section: Introductionmentioning

confidence: 99%

Monolithic coupling between high- and mid-index, multi-micron waveguides for O-band applications

Skandalos

Bucio²,

Mastronardi

et al. 2023

Silicon Photonics XVIII

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In this work, a coupling strategy between mid-index SiNx and high-index active waveguides on the same silicon chip is proposed. To that aim, a sophisticated proof-of-concept integration between N-rich SiN and SOI micrometric waveguides is demonstrated achieving a <0.5 dB coupling for both TE/TM polarisations. The optical tunability of SiNx allows the mitigation of the mid-high refractive index discrepancy by interposing a SiO 2 /Si-rich SiN double-layer anti-reflective coating, attaining back-reflections close to −20 dB. On that basis, it is shown numerically that a sub-dB interconnection between multiple-quantum well/dot stratified stacks and a silicon nitride passive waveguide is achievable, while keeping the introduced back-reflection level below −30 dB.

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“…[14][15][16] Owing to its broad transparency range, silicon nitride becomes a leading candidate for sensing applications in visible and nearinfrared regions. 17 The ring resonator is one of the key components of PICs. The ring resonator itself acts as a device and it is used in variety of applications including wavelength division multiplexers (WDM), filters, sensors and modulators.…”

Section: Introductionmentioning

confidence: 99%

“…Also, it is possible to demonstrate supercontinuum generation as well as frequency comb generation with Silicon Nitride 14–16 . Owing to its broad transparency range, silicon nitride becomes a leading candidate for sensing applications in visible and near‐infrared regions 17 . The ring resonator is one of the key components of PICs.…”

Section: Introductionmentioning

confidence: 99%

Design and analysis of ring resonator with slot waveguide coupling into a slab ring construction for refractive index sensing applications

Kulanthaivel,

Ashok

2023

Micro & Optical Tech Letters

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We proposed a theoretical study of silicon nitride ring resonator configuration for the application of refractive index sensing. In this paper, a slot waveguide has been used to couple the light into the slab ring structure. We have designed the slab ring and slot waveguides with silicon nitride (Si3N4) on a substrate made of silica (SiO2). Transverse electric (TE) mode has been used for the entire analysis at an operating wavelength of 1550 nm. The presented structure has been geometrically optimized to get the better transmission results. The design shows a resonance wavelength of 1538.74 nm when the cladding refractive index is equal to 1, which is placed at the top of the slab ring structure. We have also calculated the effect on the transmission curve for different waveguide parameters. For, the structure achieves a resonance wavelength around 1563.65 nm. The geometrically optimized structure achieved a Q‐factor of 750 and a sensitivity of 70 nm/RIU. In the proposed paper, the shift in the resonance of the transmission spectrum has been utilized to detect the Refractive Index (RI) changes on the surface of the ring. Therefore, the proposed structure can be used effectively in the applications of refractive index sensing.

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A Review of Capabilities and Scope for Hybrid Integration Offered by Silicon-Nitride-Based Photonic Integrated Circuits

Cited by 41 publications

References 300 publications

High-Efficiency focusing grating coupler with distributed Bragg reflector

High-Efficiency focusing grating coupler with distributed Bragg reflector

Monolithic coupling between high- and mid-index, multi-micron waveguides for O-band applications

Design and analysis of ring resonator with slot waveguide coupling into a slab ring construction for refractive index sensing applications

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