A Review of Capacitive MEMS Hydrogen Sensor using Pd based Metallic Glass with Fast Response and Low Power Consumption

Abstract

This paper reports on a capacitive MEMS hydrogen sensor using Pd-based metallic glass (MG) for future hydrogen society. First, we investigate PdCuSi as a Pd-based MG and show that this material is promising for capacitive MEMS hydrogen sensor. Second, we employ the Pd-based MG in a hydrogen sensor that has an inverted Tshaped electrode. The sensor is fabricated by a surface micromachining process. We show that the fabricated hydrogen sensor exhibits hysteresis-free and fast response properties at room temperature. K E Y W O R D Scapacitive, hydrogen sensor, hydrogen society, MEMS, Pd-based metallic glass 2 SENSING FILMS Pd-based metallic glassPd has excellent hydrogen absorption characteristics but hydrogen is absorbed as a metal hydride, and as a result, the response to hydrogen is slow, and heat is required to release 70

Integrated hybrid MEMS hydrogen sensor with high sensitivity and high dynamic range

“…Flow rate of gas fed to the chamber was set to 5 or 25.5 L/min. In the latter case, gas inside the chamber can be replaced within 1 s 12 . Packages with bonded samples were set on a printed board.…”

“…We proposed a capacitive MEMS hydrogen sensor 11,12 . That sensor featuring excellent characteristics in terms of low power consumption, fast response, and hysteresis‐free operation, was designed for hydrogen leakage detection, and detectable concentration range was limited.…”

ZnO-NWs/metallic glass nanotube hybrid arrays: Fabrication and material characterization

“…36,37 Pd-based TFMG coating on the silicon substrate (PdCuSi) and hybrid of TFMG with semiconductor material (ZnO-NWs, nanorod and nanotube) can also be used for the detection of hydrogen gas and UV photodetector. [38][39][40][41] Magnetron sputtering is a straight-forward approach to the deposition of TFMG over a patterned liftoff material to create a hybrid micro-nanoscale device with high chemical stability and excellent mechanical strength. This approach also provides excellent control over the diameter and length of free-standing metallic glass nanotubes heterostructures materials.…”