A review of high-performance MEMS sensors for resource exploration and geophysical applications

Liu, Huafeng; Luo, Zhicai; Hu, Zhong-Kun; Yang, Shan-Qing; Tu, Liangcheng; Zhou, Zebing; Kraft, Michaël

doi:10.1016/j.petsci.2022.06.005

Cited by 53 publications

(15 citation statements)

References 71 publications

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“…Volatile Organic Compounds (VOCs) detection technology refers to identifying characteristic compounds in the exhaled air, blood, and urine of trapped individuals by determining the type and content of VOCs in the environment [24]. Breathing is considered a unique feature that can determine if a trapped individual is still alive [25] by detecting CO2 and O2 levels. Ion Mobility Spectrometry (IMS) and electronic sensors are common VOCs life-detection instruments [26], where IMS separates these volatile organic compounds according to the difference in the drift velocity of the product ions in the inert buffer gas under the influence of an electric field [27].…”

Section: Classification Based On Wavelength Used By the Sensormentioning

confidence: 99%

Detecting the Unseen: Understanding the Mechanisms and Working Principles of Earthquake Sensors

Tian¹,

Liu²,

Mo³

et al. 2023

Preprint

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The application of movement-detection sensors is crucial for understanding surface movement and tectonic activities. The development of modern sensors has been instrumental in earthquake monitoring, prediction, early warning, emergency commanding and communication, search and rescue, and life detection. There are numerous sensors currently being utilized in earthquake engineering and science. It is essential to review their mechanisms and working principles thoroughly. Hence, we have attempted to review the development and application of these sensors by classifying them based on the timeline of earthquakes, physical or chemical mechanisms of sensors, and location of sensor platforms. In this study, we analyzed all available sensor platforms that have been widely used in recent years, with satellites and UAVs being among the most used. The findings of our study will be useful for future earthquake response and relief efforts, as well as research aimed at reducing earthquake disaster risks.

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Section: Classification Based On Wavelength Used By the Sensormentioning

confidence: 99%

Detecting the Unseen: Understanding the Mechanisms and Working Principles of Earthquake Sensors

Tian¹,

Liu²,

Mo³

et al. 2023

Preprint

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“…To achieve higher precision in borehole measurements, on one hand, the rapid development of micro-electro-mechanical systems (MEMS) technology has introduced a range of high-precision MEMS sensors, including MEMS accelerometers, gyroscopes, and magnetometers with low noise floors. Their emergence holds promise for providing effective solutions for drilling processes with lowcost requirements, as well as constraints on size, weight, or operating in harsh environments [3]. On the other hand, by minimizing error sources such as misalignment between the measurement package and the wellbore, magnetic interferences from the drill string, and the use of local geomagnetic references, deviations between actual and planned wellbore trajectories can be further reduced [4].…”

Section: Introductionmentioning

confidence: 99%

Estimation of geomagnetic components under unknown interferences for drilling tools

Li,

Geng,

Yang

et al. 2024

Meas. Sci. Technol.

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The geomagnetic components measurement directly influences the azimuth and magnetic Toolface of downhole drilling tools. Accurate estimation of the geomagnetic components is crucial for wellbore trajectory control. However, the unknown magnetic interferences caused by ferromagnetic drilling tools introduce significant errors in the estimation of the geomagnetic components. Firstly, this paper considers the constraint of a constant total magnetic field value and introduces the unknown axial interferences of the drilling tools as a new state. At the same time, parameter uncertainties and radial interferences within the drilling tools are regarded as unknown but bounded, leading to the establishment of a linear time-varying system model for the measurement system. Then, a state estimation method based on the Zonotopic Kalman Filter is proposed for geomagnetic components and attitude measurements. The simulation results indicate that, compared to the Zonotopic Kalman Filter method without considering nonlinear constraints, the method proposed in this paper effectively separates the axial interference of the geomagnetic components from the drilling tools during dynamic measurements. The root mean square errors of the estimated three-axis geomagnetic components are reduced to 0.0249 Gauss, 0.0082 Gauss, and 0.0148 Gauss, resulting in improvements in accuracy of 96.06%, 28.6%, and 14.1%, respectively. Furthermore, the root mean square errors of the gravity Toolface, magnetic Toolface, and azimuth estimation decreased to 1.8296°, 1.8294°, and 3.2898°, leading to enhancements in accuracy of 9.61%, 9.71%, and 96.37%, respectively. Finally, experimental validation confirms the effectiveness of the proposed method, providing a reference basis for dynamic measurement while drilling.

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“…This proposed MEMS-based THz metamaterial (MTM) is composed of SRR configuration on the patterned silicon (Si) substrate with through Si via (TSV). SRR configuration is released and suspended on TSV, which can be used for pressure sensing applications [ 43 , 44 , 45 , 46 , 47 , 48 ]. In the initial state, the influences of electromagnetic responses in transverse magnetic (TM) and transverse electric (TE) modes are investigated to optimize the MTM geometric parameters.…”

Section: Introductionmentioning

confidence: 99%

Tunable MEMS-Based Terahertz Metamaterial for Pressure Sensing Application

Lai

et al. 2023

Micromachines

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In this study, a tunable terahertz (THz) metamaterial using the micro-electro-mechanical system (MEMS) technique is proposed to demonstrate pressure sensing application. This MEMS-based tunable metamaterial (MTM) structure is composed of gold (Au) split-ring resonators (SRRs) on patterned silicon (Si) substrate with through Si via (TSV). SRR is designed as a cantilever on the TSV structure. When the airflow passes through the TSV from bottom to up and then bends the SRR cantilever, the SRR cantilever will bend upward. The electromagnetic responses of MTM show the tunability and polarization-dependent characteristics by bending the SRR cantilever. The resonances can both be blue-shifted from 0.721 THz to 0.796 THz with a tuning range of 0.075 THz in transverse magnetic (TM) mode and from 0.805 THz to 0.945 THz with a tuning range of 0.140 THz in transverse electric (TE) mode by changing the angle of SRR cantilever from 10° to 45°. These results provide the potential applications and possibilities of MTM design for use in pressure and flow rate sensors.

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A review of high-performance MEMS sensors for resource exploration and geophysical applications

Cited by 53 publications

References 71 publications

Detecting the Unseen: Understanding the Mechanisms and Working Principles of Earthquake Sensors

Detecting the Unseen: Understanding the Mechanisms and Working Principles of Earthquake Sensors

Estimation of geomagnetic components under unknown interferences for drilling tools

Tunable MEMS-Based Terahertz Metamaterial for Pressure Sensing Application

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