A review of MEMS-based metal oxide semiconductors gas sensor in Mainland China

Niu, Gaoqiang; Wang, Fei

doi:10.1088/1361-6439/ac5b98

Cited by 31 publications

(13 citation statements)

References 79 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Such a simple cantilever structure also facilitates the development of microheater sensor arrays. More recently, Xu et al put forth a hexagonal micro hot plate that integrates six individual sensing channels (Figure e). , The sensing regions are situated in the middle of each edge while the whole hexagon framework is supported by beams at the corner, which balanced the power consumption and mechanical strength well. Test results indicate that the average power consumption of the sensor cell at 2.0 V is just 3.03 mW.…”

Section: Ultralow-power Mems Gas Sensor Designmentioning

confidence: 99%

“…According to previous reports, on heating to around 250 °C, the power consumption of a suspended-membrane type micro hot plate was only 10–30 mW while the closed-membrane type micro hot plate power consumption soared to 50–80 mW. Moreover, unlike the closed membrane, a suspended-membrane type micro hot plate could be formed by front-side etching of a silicon wafer without a double-sided alignment, which is usually considered to be more compatible with the complementary metal oxide semiconductor (CMOS) fabrication process. − All of these make a suspended-membrane type micro hot plate more ideal for easy commercialization of low-power applications.…”

Section: Ultralow-power Mems Gas Sensor Designmentioning

confidence: 99%

“…(d) Single microcantilever . (e) Hexagonal sensor cell . Reproduced in part with permission from ref .…”

Section: Ultralow-power Mems Gas Sensor Designmentioning

confidence: 99%

Section: Ultralow-power Mems Gas Sensor Designmentioning

confidence: 99%

See 3 more Smart Citations

Challenges and Opportunities of Chemiresistors Based on Microelectromechanical Systems for Chemical Olfaction

et al. 2022

View full text Add to dashboard Cite

Microelectromechanical-system (MEMS)-based semiconductor gas sensors are considered one of the fastest-growing, interdisciplinary high technologies during the post-Moore era. Modern advancements within this arena include wearable electronics, Internet of Things, and artificial brain-inspired intelligence, among other modalities, thus bringing opportunities to drive MEMSbased gas sensors with higher performance, lower costs, and wider applicability. However, the high demand for miniature and micropower sensors with unified processes on a single chip imposes great challenges. This review focuses on recent developments and pitfalls in MEMS-based micro-and nanoscale gas sensors and details future trends. We also cover the background of the topic, seminal efforts, current applications and challenges, and opportunities for next-generation systems.

show abstract

Section: Ultralow-power Mems Gas Sensor Designmentioning

confidence: 99%

Section: Ultralow-power Mems Gas Sensor Designmentioning

confidence: 99%

See 2 more Smart Citations

Challenges and Opportunities of Chemiresistors Based on Microelectromechanical Systems for Chemical Olfaction

et al. 2022

View full text Add to dashboard Cite

show abstract

“…An emerging technology called a microelectromechanical system (MEMS) is utilized to create tiny devices using microfabrication methods [1][2][3] . MEMS devices can have a wide range of sizes but typically fall between 100 nm and 1000 µm (or 1 mm).…”

Section: Introductionmentioning

confidence: 99%

A Review on Microchannel Fabrication Methods and Applications in Large-Scale and Prospective Industries

Afzal¹,

Tayyaba²,

Ashraf³

et al. 2022

Evergreen

View full text Add to dashboard Cite

Microchannels based on microelectromechanical systems (MEMS) have received a lot of interest in the microfluidics and biomedical fields over the past forty years. While their applications have been multifarious, a comprehensive literature review focusing on their design, type, and applications is not currently present in the literature. Researchers working on these elements of microchannels will gain targeted knowledge from the current review on microchannels. Due to its advanced properties, flexibility of mass, and small size, microdevice demand has been rising quickly, particularly in industrial applications. The classification of microchannels and their uses are the main focus of this work. These include but are not limited to molding, electroplating, lithography, lab-ona-chip, micromolding, micromachining, micromilling, laser ablation, lithography, microcontact printing (µcp), hot embossing, electrochemical micromachining (EMM), and etching. In addition, numerous hybrid techniques for microchannel manufacturing have been reported. So, in essence, this review offers a range of advancements in microchannel manufacturing. The review also attempts to present a qualitative analysis describing the various methodologies associated with microchannels in terms of their design, shape, and flow regimes for applications such as pressure drop and transfer of heat prediction. Additionally, depending on the precise uses needed, a number of materials, including but not limited to ceramics, silicon, metals, and polymers, are utilized in the manufacture of microchannels. On metallic substrates, polymers such as silicon, glass, and polymeric materials are used. The biomedical industry uses polymeric and glass substrates instead of silicon substrates, which are used for mechanical engineering and electronic applications. In addition to outlining methods for choosing the best kind of microchannel, this paper also suggests important directions for the future.

show abstract

VOC Detection with Zinc Oxide Gas Sensors: A Review of Fabrication, Performance, and Emerging Applications

Waqas Alam,

Sharma,

Sharma

et al. 2024

Electroanalysis

View full text Add to dashboard Cite

Energy‐efficient, high‐specificity gas sensors provide practical suitability for stability and response factors. The recognition of ignitable gases (methane (CH 4), propane (C 3H 8), and hydrogen (H 2) and harmful gases (carbon oxide (CO) and hydrogen sulfide (H 2S)) in an enclosed and out‐of‐door space are essential to safeguard the human lives and infrastructural spaces. One of the crucial conductive‐type metal oxide semiconductor (MOS) gas sensors yielding wide applications is zinc oxide (ZnO). This study highlights the various types of ZnO gas sensors, their fabrication techniques, and specific vital characterizations. The devices based on MOS are utilized to sense various target gases through redox reactions. The variation in oxide surface with target gas interactions is transduced to a change of sensor conductance. This review also provides insight into integrating ZnO gas sensors with technologies such as materials engineering, the Internet of things and big data. Moreover, this review addresses ZnO gas sensors' challenges and future directions.

show abstract

A review of MEMS-based metal oxide semiconductors gas sensor in Mainland China

Cited by 31 publications

References 79 publications

Challenges and Opportunities of Chemiresistors Based on Microelectromechanical Systems for Chemical Olfaction

Challenges and Opportunities of Chemiresistors Based on Microelectromechanical Systems for Chemical Olfaction

A Review on Microchannel Fabrication Methods and Applications in Large-Scale and Prospective Industries

VOC Detection with Zinc Oxide Gas Sensors: A Review of Fabrication, Performance, and Emerging Applications

Contact Info

Product

Resources

About