A Review of Nanoporous Metals in Interconnects

Mohan, Kashyap; Shahane, Ninad; Liu, Ran; Smet, Vanessa; Αντωνίου, Αντωνία

doi:10.1007/s11837-018-3081-z

Cited by 31 publications

(33 citation statements)

References 62 publications

Supporting

Mentioning

Contrasting

Unclassified

Order By: Relevance

“…Metallic nanoporous materials have very interesting properties and applications as catalysts and adsorbents. [116,[192][193][194][195] Although, nanoporous metals can also be synthesized by using scCO 2 , extremely limited number of reports are only available. Nanoporous Ag was formed by selectively etching Cu from multiphase AgCu alloys using hydrogen peroxide and the metal chelator hexafluoroacetylacetone that were dissolved in scCO 2 (60 °C and 16 MPa).…”

Section: Preparation Of Nanoporous Metals Using Sccomentioning

confidence: 99%

Synthesis of Metal Nanostructures Using Supercritical Carbon Dioxide: A Green and Upscalable Process

Siril

Türk

2020

Small

View full text Add to dashboard Cite

Metallic nanostructures have numerous applications as industrial catalysts and sensing platforms. Supercritical carbon dioxide (scCO2) is a green medium for the scalable preparation of nanomaterials. Supercritical fluid reactive deposition (SFRD) and other allied techniques can be employed for the mass production of metal nanostructures for various applications. The present article reviews the recent reports on the scCO2‐assisted preparation of zero‐valent metal nanomaterials and their applications. A brief description of the science of pure supercritical fluids, especially CO2, and the basics of binary mixtures composed of scCO2 and a low volatile substance, e.g., an organometallic precursor are presented. The benefits of using scCO2 for preparing metal nanomaterials, especially as a green solvent, are also being highlighted. The experimental conditions that are useful for the tuning of particle properties are reviewed thoroughly. The range of modifications to the classical SFRD methods and the variety of metallic nanomaterials that can be synthesized are reviewed and presented. Finally, the broad ranges of applications that are reported for the metallic nanomaterials that are synthesized using scCO2 are reviewed. A brief summary along with perspectives about future research directions is also presented.

show abstract

Section: Preparation Of Nanoporous Metals Using Sccomentioning

confidence: 99%

Synthesis of Metal Nanostructures Using Supercritical Carbon Dioxide: A Green and Upscalable Process

Siril

Türk

2020

Small

View full text Add to dashboard Cite

show abstract

“…They have also been recently demonstrated for dieattachment interconnections [27]. Cost-effective synthesis of such nanofoams, with direct manipulation of physical properties through nanoscale porosity, leading to an engineered morphology of ligaments and nodes with low modulus and easy compressibility is a promising approach to form hermetic contact seals.…”

Section: Microelectronicsmentioning

confidence: 99%

Heterogeneous Integration

2020

Advancing Microelectronics Magazine

View full text Add to dashboard Cite

“…Although most of the applications of Mn-containing alloys are associated with industrial uses, our interest in Cu-Mn alloys comes from their potential application as a precursor for the formation of nanoporous Cu (np-Cu) structures for use in microelectronic packaging applications [18]. These np-Cu structures have a high surface area-to-volume Electrochem 2021, 2 521 ratio that ultimately promotes a melting temperature depression.…”

Section: Introductionmentioning

confidence: 99%

Electrodeposition of Cu-Mn Films as Precursor Alloys for the Synthesis of Nanoporous Cu

Castillo

Dimitrov

2021

Electrochem

View full text Add to dashboard Cite

Cu-Mn alloy films are electrodeposited on Au substrates as precursor alloys for the synthesis of fine-structured nanoporous Cu structures. The alloys are deposited galvanostatically in a solution containing ammonium sulfate, (NH4)2SO4, which serves as a source of the ammine ligand that complexes with Cu, thereby decreasing the inherent standard reduction potential difference between Cu and Mn. The formation of the [Cu(NH3)n]2+ complex was confirmed by UV-Vis spectroscopic and voltammetric studies. Galvanostatic deposition at current densities ranging from 100 to 200 mA⋅cm−2 generally resulted in the formation of type I, crystalline coatings as revealed by scanning electron microscopy. Although the deposition current efficiency is (<30%) generally low, the atomic composition (determined by energy dispersive X-ray spectroscopy) of the deposited alloys range from 70–85 at% Mn, which is controlled by simply adjusting the ratio of the metal ion concentrations in the deposition bath. Anodic stripping characterization revealed a three-stage dissolution of the deposited alloys, which suggests control over the selective removal of Mn. The composition of the alloys obtained in the studies are ideal for electrochemical dealloying to form nanoporous Cu.

show abstract

A Review of Nanoporous Metals in Interconnects

Cited by 31 publications

References 62 publications

Synthesis of Metal Nanostructures Using Supercritical Carbon Dioxide: A Green and Upscalable Process

Synthesis of Metal Nanostructures Using Supercritical Carbon Dioxide: A Green and Upscalable Process

Heterogeneous Integration

Electrodeposition of Cu-Mn Films as Precursor Alloys for the Synthesis of Nanoporous Cu

Contact Info

Product

Resources

About