A review of the existing performance verification infrastructure for micro-CMMs

Claverley, James D.; Leach, Richard

doi:10.1016/j.precisioneng.2014.06.006

Cited by 55 publications

(40 citation statements)

References 30 publications

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“…Finally, industry is asking for comparability of measurement results and of system specifications. A written standard for performance verification dedicated to micro CMMs, or preferably an amendment of an existing standard is clearly needed [3].…”

Section: Application In Industrymentioning

confidence: 99%

State of the Art of Tactile Micro Coordinate Metrology

2016

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Micro parts are increasingly found in a number of industrial products. They often have complex geometrical features in the millimeter to micrometer range which are not accessible or difficult to measure by conventional coordinate measuring machines or by optical microscopy techniques. In the last years, several concepts of tactile micro coordinate measuring machines have been developed in research laboratories and were partly commercialized by industry. The major challenges were related to the development of innovative micro probes, to the requirements for traceability and to the performance assessment at reduced measurement uncertainty. This paper presents a review on state of the art developments of micro coordinate measuring machines and 3D micro probes in the last 20 years, as far as these were qualified in a comparable way, with a special emphasis on research conducted by the Federal Institute of Metrology METAS in this field. It outlines the accuracy limitations for the probe head including the probing element and for the geometrical errors of the machine axes. Finally, the achieved performances are summarized and the challenges for further research are addressed.

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Section: Application In Industrymentioning

confidence: 99%

State of the Art of Tactile Micro Coordinate Metrology

2016

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“…The considered values of the standard deviation correspond to typical noise values observed on the measuring system. = 5 nm corresponds to the noise caused by the probing system integrated on ultra-high precision CMM [5,6], while = 50 nm corresponds to the noise that can be seen on classical CMM. > 100 nm corresponds to the noise produced by the measuring system integrated on µCT.…”

Section: -Evaluation Of the Robustness Of The Developed Algorithms Omentioning

confidence: 99%

“…The CT is a technology based on the computer-processed X-rays, which produces tomographic data/image of specific areas of the scanned artefact, allowing the operator to get information about inside and/or outside of the artefact [1][2][3][4]. The CMM involves tactile and/or optical measurement only of the outside of the artefact [5][6][7]. The obtained data are fused into a common coordinate system using coarse and fine registration methods [8].…”

Section: Introductionmentioning

confidence: 99%

Novel automated methods for coarse and fine registrations of point clouds in high precision metrology

Rantoson

Nouira²,

Anwer³

et al. 2015

Int J Adv Manuf Technol

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Several measuring systems can be combined to perform accurate assessments at the submicrometre level in dimensional metrology. The obtained data are fused into a common coordinate system using registration methods for which the optimal transformation parameters from the common parts of the data called correspondences are computed. New original automated coarse and fine registration methods are proposed here using discrete curvatures: an improved Hough Transformation method for the coarse registration and three Iterative Closest Points (ICP) variants for the fine registration. The enhancement of Hough consists of exploiting the curvature parameters in order to minimize the basic algorithm complexity. Thus local transformation parameters are only computed for points presenting similar precalculated surface type.While the rough alignment of the scene data and the model data is thereafter optimized through the fine registration using commonly ICP algorithm, the first ICP variant includes the curvedness and surface type similarity constraints, especially to reduce the searching area during the matching step.For the proposed second ICP variant, correspondences are searched using a specific distance criterion involving curvature features similarity measure defined from principal curvatures. The third ICP variant combines both point-to-point and point-to-plane minimizations automatically -2 -weighted in the objective function, with the use of Moving Least Squares (MLS) surface technique to determine the corresponding point in point-to-point part.The three developed methods are tested on simulated and real data obtained from a computer tomography (CT) system. The results reveal the benefit of the proposed new automated coarse and fine registration approaches.

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“…In many cases, the complete inner and outer geometry of these micro-parts must be verified to ensure their quality and functionality, whereas small geometrical features are inaccessible by conventional Coordinating Measuring Machines (CMMs). In order to measure those microparts, some novel CMMs with accuracy of tens of nanometers (called micro CMM or nano CMM) have been developed [1], such as the Molecular Measuring Machine developed by the National Institute of Standards and Technology (NIST) [2], the High-Precision Micro-CMM developed by the University of Tokyo and the National Institute of Advanced Industrial Science and Technology (AIST) [3], the special CMM developed by the Physikalisch-Technische Bundesanstalt (PTB) [4], the small-sized CMM developed by the National Physical Laboratory (NPL) [5], the Nanopositioning and Nanomeasuring Machine (NPMM) developed by the Ilmenau University of Technology [6][7][8], etc. The measurement range of these micro CMMs is not larger than 50mm in the X, Y and Z directions.…”

Section: Introductionmentioning

confidence: 99%

Development of an Abbe Error Free Micro Coordinate Measuring Machine

Huang

Wang

et al. 2016

Applied Sciences

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Abstract:A micro Coordinate Measuring Machine (CMM) with the measurement volume of 50 mmˆ50 mmˆ50 mm and measuring accuracy of about 100 nm (2σ) has been developed. In this new micro CMM, an XYZ stage, which is driven by three piezo-motors in X, Y and Z directions, can achieve the drive resolution of about 1 nm and the stroke of more than 50 mm. In order to reduce the crosstalk among X-, Y-and Z-stages, a special mechanical structure, which is called co-planar stage, is introduced. The movement of the stage in each direction is detected by a laser interferometer. A contact type of probe is adopted for measurement. The center of the probe ball coincides with the intersection point of the measuring axes of the three laser interferometers. Therefore, the metrological system of the CMM obeys the Abbe principle in three directions and is free from Abbe error. The CMM is placed in an anti-vibration and thermostatic chamber for avoiding the influence of vibration and temperature fluctuation. A series of experimental results show that the measurement uncertainty within 40 mm among X, Y and Z directions is about 100 nm (2σ). The flatness of measuring face of the gauge block is also measured and verified the performance of the developed micro CMM.

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A review of the existing performance verification infrastructure for micro-CMMs

Cited by 55 publications

References 30 publications

State of the Art of Tactile Micro Coordinate Metrology

State of the Art of Tactile Micro Coordinate Metrology

Novel automated methods for coarse and fine registrations of point clouds in high precision metrology

Development of an Abbe Error Free Micro Coordinate Measuring Machine

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