Energy scavenging research shows a growing interest these last years. This paper aims to demonstrate the ability of micromachined vibrating structures to store mechanical energy and then to convert it into electrical energy through a piezoelectric plate. Such a micro power generator may be used as a mechanical to electrical energy transformer. The energy conversion consists in a mechanical shock enabling to convert low vibrating energy levels at very low frequencies (typically below 10 Hz for human being excitation source) to mechanical energy to the vibrating structure for which resonant frequencies are ranging from 10 kHz to 1 MHz. Moreover this basic low frequencies to high frequencies spectrum conversion enables to avoid frequency tuning designing that is required for adapting the frequency spectrum of the excitation source.

Both optical and tactile probes are often used in dimensional metrology applications, especially for roughness, form, thickness and surface profile measurements. To perform such kinds of measurements with a nanometre-level of accuracy (∼30 nm), Laboratoire National de Métrologie et d’Essais (LNE) has developed a new high-precision machine. The architecture of the machine contains a short and stable metrology frame dissociated from the supporting frame. It perfectly respects the Abbe principle. The metrology loop supports reference laser interferometers and is equipped either with an optical probe or a tactile probe of nanometric resolution and linear residuals. The machine allows in situ calibration of the measuring optical and tactile probes by comparison to the laser interferometer measurements, considered as a reference. In this paper, both architecture and operation of the LNE's high-precision profilometer are detailed. A brief comparison of the behaviour (linear residuals) of the confocal chromatic and tactile probes is presented. Optical and tactile scanning of V-grooves artefacts with 75, 24, 7.5, 2.4, 0.75 and 0.24 µm depths are illustrated and discussed. In addition, a comparison between optical, tactile and atomic force microscopy measurements on a VLSI SHS 880-QC is also performed. Finally, a comparison of an optical and tactile scanning of optical aspherical lens with a polymer coating is presented and discussed.

In relation to the industrial need and to the progress of technology, LNE would like to improve the measurement of its primary pressure, spherical and flick standards. The spherical and flick standards are respectively used to calibrate the spindle motion error and the probe which equips commercial conventional cylindricity measuring machines. The primary pressure standards are obtained using pressure balances equipped with rotary pistons with an uncertainty of 5 nm for a piston diameter of 10 mm. Conventional machines are not able to reach such an uncertainty level. That is why the development of a new machine is necessary. To ensure such a level of uncertainty, both stability and performance of the machine are not sufficient and the data processing should also be done with an accuracy less than the nanometre. In this paper, the new method based on the Small Displacement Screw (SDS) model is proposed. A first validation of this method is proposed on a theoretical dataset published by the European Community Bureau of Reference (BCR) in report n°3327. Then, an experiment is prepared in order to validate the new method on real datasets. Specific environment conditions are taken into account and many precautions are considered. The new method is applied to analyze the least squares circle, minimum zone circle, maximum inscribed circle and minimum circumscribed circle. The results are compared to those done by the reference Chebyshev best-fit method and reveal a perfect agreement. The sensibility of SDS and Chebyshev methodologies are investigated, and it is revealed that results remain unchanged when the value of the diameter exceeds 700 times the form error.

is an open access repository that collects the work of Arts et Métiers ParisTech researchers and makes it freely available over the web where possible. AbstractIn relation to the industrial need and to the progress of technology, Laboratoire National de Métrologie et d'Essais (LNE) would like to improve the measurement of its primary pressure standards, spherical and flick standards. The spherical and flick standards are, respectively, used to calibrate the spindle motion error and the probe, which equip commercial conventional cylindricity-measuring machines. The primary pressure standards are obtained using pressure balances equipped with rotary pistons. To reach a relative uncertainty of 10 −6 in the pressure measurement, it is necessary to know the diameters of both the piston and the cylinder with an uncertainty of 5 nm for a piston diameter of 10 mm. Conventional machines are not able to reach such an uncertainty level. That is why the development of a new machine is necessary. The purpose of this paper is to present the concepts and the architecture adopted in the development of the new equipment dedicated to cylindricity measurement at a nanometric level of a accuracy. The choice of these concepts is based on the analysis of the uncertainty sources encountered in conventional architectures. The architecture of the new ultra-high equipment as well as the associated calibration procedures will be described and detailed.