Concept and architecture of a new apparatus for cylindrical form measurement with a nanometric level of accuracy

Abstract

is an open access repository that collects the work of Arts et Métiers ParisTech researchers and makes it freely available over the web where possible. AbstractIn relation to the industrial need and to the progress of technology, Laboratoire National de Métrologie et d'Essais (LNE) would like to improve the measurement of its primary pressure standards, spherical and flick standards. The spherical and flick standards are, respectively, used to calibrate the spindle motion error and the probe, which equip commercial conventional cylindricity-measuring machines. The primary pressure standards are obtained using pressure balances equipped with rotary pistons. To reach a relative uncertainty of 10 −6 in the pressure measurement, it is necessary to know the diameters of both the piston and the cylinder with an uncertainty of 5 nm for a piston diameter of 10 mm. Conventional machines are not able to reach such an uncertainty level. That is why the development of a new machine is necessary. The purpose of this paper is to present the concepts and the architecture adopted in the development of the new equipment dedicated to cylindricity measurement at a nanometric level of a accuracy. The choice of these concepts is based on the analysis of the uncertainty sources encountered in conventional architectures. The architecture of the new ultra-high equipment as well as the associated calibration procedures will be described and detailed.

Miniature silicon Michelson interferometer characterization for dimensional metrology

“…Based on the presented results in section (IV-A), micro-probe "B" seems to be more accurate and appropriate for dimensional metrology applications with a nanometer target uncertainty such as measurements of straightness, roundness and cylindricity (form errors [20]) as well as the measurement of profile and roughness [21] inside small bore with a diameter inferior to 1 mm. The contactless calibration of the form errors and the roughness of small bore represent a challenging request in NMIs (calibration of standard artifacts) and in industrial applications, related to: automotive (fuel injection nozzles), horology (small gears and parts), spatial, and medical (needle-free injection system), etc.…”

“…The test bench is designed to calibrate the developed microprobe at different measuring ranges and it is based on the application of the dissociated metrology technique (DMT) [19,20]. In order to apply the DMT principle, the Aluminum block (17) supporting the laser interferometer (16) was dissociated from the test bench base made of aluminum, by two flexible blades (Fig.…”

Measurement technologies for precision positioning

“…As an illustration of how various position measuring systems can be used in a dedicated form measuring instrument system, in Fig. 39 the set-up as described by Vissiè re [215] is shown. The basis of the measuring method is that the measured object is always measured in comparison with a reference cylinder with a constant geometry.…”

“…39. Schematic of a form measuring instrument as described by Vissiè re [215]. On the other hand, a linear encoder has also been used in a SPM Zscanner for accurate measurement of the probe tip displacement, in which the axis of the scale is aligned co-axially with the probe tip to reduce the influence of Abbe errors [79].…”

Ultra-high precision CMMs and their associated tactile or/and optical scanning probes

“…All these machines also apply the dissociated metrological structure principle [6,7] where the metrology frame is decoupled from the rest of the machine and remains stress free to properly perform its own function consisting in tracking the X-Y -motion of a table with respect to the Abbe principle by using laser interferometers of sub-nanometre resolution. The selection of zerodur materials for the table allows designing non-symetric CMM machines since the thermal dilatation of such material is negligible, especially when the environment temperature is well controlled in a range of ±0.…”