A Scanning Force Microscope Combined with a Scanning Electron 
Microscope for Multidimensional Data Analysis

Troyon, M.; Lei, H.N.; Wang, Zhonghuai; Shang, Guangyi

doi:10.1051/mmm:1997130

Cited by 44 publications

(30 citation statements)

References 20 publications

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“…The sample B was studied by using a home-made AFM combined to a scanning electron microscope (SEM) (Troyon et al, 1997) equipped with a field emission gun (LEO Gemini). Our measurements were made with this AFM/SEM combined instrument because working inside the SEM allows one to get rid of the influence of the water layer covering the surface in ambient atmosphere which hinders the electric measurements.…”

Section: Conductive-afm/sem Techniquementioning

confidence: 99%

See 1 more Smart Citation

Carrier Storage in Ge Nanocrystals Grown on Silicon Oxide by a Two Step Dewetting / Nucleation Process

Hdiy¹,

Troyon²,

Gacem³

2010

Nanocrystals

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Section: Conductive-afm/sem Techniquementioning

confidence: 99%

“…The C-AFM brought interesting information on the NCs, especially on conduction characteristics and carrier storage. This study was performed with a home made AFM working inside a scanning electron microscope (SEM) (Troyon et al, 1997).…”

Section: Introductionmentioning

confidence: 99%

Carrier Storage in Ge Nanocrystals Grown on Silicon Oxide by a Two Step Dewetting / Nucleation Process

Hdiy¹,

Troyon²,

Gacem³

2010

Nanocrystals

Self Cite

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“…3,4 The tip thus inevitably masks the surface region immediately under the tip, making it impossible to see exactly what is happening there. Although rotating the system by large angles (i.e., 70 ) alleviates this issue to an extent, the exact cross-sectional view cannot be obtained at these angles.…”

Section: Introductionmentioning

confidence: 99%

“…Furthermore, combined systems have been designed to use these two complementary microscopes for important in-situ 1,2 as well as multifunctional [3][4][5] applications, with several commercial models now available.…”

Section: Introductionmentioning

confidence: 99%

Cross-sectional atomic force microscope in scanning electron microscope

Park

Song

Kim

et al. 2014

Journal of Vacuum Science &Amp; Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phen

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A newly designed atomic force microscope (referred to as “cross-sectional AFM” or “xAFM”) is demonstrated that enables tip–sample interactions to be studied directly from a cross-sectional scanning electron microscope (SEM) view during AFM operation. Previously, such interactions have only been modeled using computer simulations or sensor-generating data. The xAFM will allow researchers to acquire additional visual information not available with conventional microscopic techniques. The xAFM is operated in a tungsten filament SEM, by examining a grating sample that is cleaved and mounted on the sample scanner so that the cleaved cross section faces upwards toward the bottom of the electron column. The tip scans horizontally, parallel to and at a height slightly lower than the cross-sectional surface of the sample but within the depth of focus of the SEM. Three experiments are described that show the unique features of the xAFM. The first demonstrates direct observation of the “tip-convolution” in real-time SEM images. The second shows unambiguous identification of an artifact in the lateral force microscope, from which a “double dip” appears in the signal from a damaged tip in a backward scan of the grating surface. The third enables measurements from blurred SEM images of large-amplitude oscillating high-Q AFM cantilevers in vacuum.

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“…Then, the main inherent sources of measurement bias will be discussed and different ways to limitate them or to take them into account will be proposed. [13,14]. The latter one, the principle of which is schematized in Figure 2, was designed to be inserted in and combined with a scanning electron microscope, in order to take advantage of the complementarity of the two techniques.…”

Section: Introductionmentioning

confidence: 99%

Quantitative Analysis of Scanning Force Microscopy Images of Nickel-Based Superalloys

Hazotte

Troyon

Bourhettar

1996

Microsc. Microanal. Microstruct.

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A Scanning Force Microscope Combined with a Scanning Electron Microscope for Multidimensional Data Analysis

Cited by 44 publications

References 20 publications

Carrier Storage in Ge Nanocrystals Grown on Silicon Oxide by a Two Step Dewetting / Nucleation Process

Carrier Storage in Ge Nanocrystals Grown on Silicon Oxide by a Two Step Dewetting / Nucleation Process

Cross-sectional atomic force microscope in scanning electron microscope

Quantitative Analysis of Scanning Force Microscopy Images of Nickel-Based Superalloys

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