A scanning mirror with extremely high resonance frequency up to 0.51 MHz using both torsion and buckling springs

Abstract

This paper reports ahout a single-crystalline Si mirror of around a millimeter in size used for laser beam scanning in an optical measurement system in a vacuum. The miniature mirror is capable of scanning at an extremely high-speed of up to OSMHz, and uses a new rotation vibration mechanism involving both torsion and buckling springs. The mirror is fabricated using deep reactive-ion-etch (DRIE) and anodic bonding technologies. The efficacy of the new mechanism is demonstrated by measuring two fabricated scanning mirrors, one having a O.1SMHz resonance frequency and the other a OSIMHz resonance frequency. This paper will explain the concept, fabrication process and discuss the experimental results.

Development of a new piezoelectric galvanometer scanner: fabrication, operation, and measurements

“…Yoo et al presented an iterative learning program in conjunction with a motor drive to improve the accuracy of the galvanometer positioning [10,11]. Considerable research has gone into the development of micro galvanometers with various structural deflection characteristics using methods, such as micro-machining [12][13][14][15][16][17][18]. The simple structure, rapid response, and ease of manufacture of piezoelectric materials has led to their use in actuators and more recently in galvanometers.…”