Development of a new piezoelectric galvanometer scanner: fabrication, operation, and measurements

Abstract

Our objective in this study was to overcome the size and complexity of existing galvanometers by developing a direct-drive galvanometer based on the deformation of a double-layer ceramic piezoelectric disc with mirrored surface. The resulting device is extremely compact (0.41 mm), light weight, and highly responsive. The performance of the galvanometer was evaluated using an electronic speckle interferometer to characterize vibration mode characteristics. The voltage and input frequency can be adjusted to match the vibration amplitude and vibration mode required for practical galvanometer operations. Using a position sensitive detector, we recorded changes in the position of a light spot generated by a single-point laser by which to track changes in the optical path imposed by the galvanometer. Experiments using graphics drawn by an open-loop control system verified the performance of the device.

Enabling High Precision Gradient Index Control in Subsurface Multiphoton Lithography

“…Some methods have been developed to mitigate field distortions, but the local intensity at the focal point still cannot be held perfectly constant. Furthermore, new developments in the field have created piezoelectric-driven galvo mirrors which may be more precise, although these are not yet commercially available . Quantization error in the galvo positioning is also a source of error …”

“…Furthermore, new developments in the field have created piezoelectric-driven galvo mirrors which may be more precise, although these are not yet commercially available. 16 Quantization error in the galvo positioning is also a source of error. 17 The photoresist in the mesoporous scaffold is extremely sensitive in the threshold region, changing in refractive index from 1.20 to 1.35 (38% of its range) with a change in average exposure power from 10.8 to 12.0 mW (peak intensities from 1.37 to 1.53 TW/cm 2 ; 11% increase).…”