A semi-coaxial MEMS LiDAR design with independently adjustable detection range and angular resolution

Xu, Fahu; Qiao, Deli; Xia, Changquan; Song, Xiumin; Zheng, Wenhui; He, Yaojun; Fan, Qiaodan

doi:10.1016/j.sna.2021.112715

Cited by 17 publications

(19 citation statements)

References 18 publications

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“…These MEMS mirror modules were integrated with the MEMS mirrors and their feedback control system. It should be noted of the that the real-time position signal MEMS mirror, with a certain angular resolution, can be provided by the MEMS mirror module [21]. The specifications of the MEMS mirror pair are presented in detail in Table 1, which shows the scanning frequency, the voltage of the drive signal, and the initial phase of the MEMS mirrors to reach the amplitude of 60 • .…”

Section: Methodsmentioning

confidence: 99%

“…Much complicated optical design is typically required to achieve a large scanning FOV, which increases the complexity of the LiDAR design [19,20]. In our early study, we proposed a semi-coaxial MEMS LiDAR design, based on a synchronous MEMS mirror pair, which consists of two uniaxial MEMS mirrors, one mirror as the transmitter, and the other as the receiver [21]. This design is a two-layer structure, with the laser emitting on the upper and the echo receiving on the lower, as shown in Figure 1.…”

Section: Introductionmentioning

confidence: 99%

“…Micromachines 2021, 12, x FOR PEER REVIEW 2 of 11 MEMS mirror pair, which consists of two uniaxial MEMS mirrors, one mirror as the transmitter, and the other as the receiver [21]. This design is a two-layer structure, with the laser emitting on the upper and the echo receiving on the lower, as shown in Figure 1.…”

Section: Introductionmentioning

confidence: 99%

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Fast Synchronization Method of Comb-Actuated MEMS Mirror Pair for LiDAR Application

Qiao

Xia³

et al. 2021

Micromachines

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MEMS-based LiDAR (micro-electro–mechanical system based light detection and ranging), with a low cost and small volume, becomes a promising solution for the two-dimensional (2D) and three-dimensional (3D) optical imaging. A semi-coaxial MEMS LiDAR design, based on a synchronous MEMS mirror pair, was proposed in our early study. In this paper, we specifically reveal the synchronization method of the comb-actuated MEMS mirror pair, including the frequency, amplitude, and phase synchronization. The frequency sweeping and phase adjustment are simultaneously implemented to accelerate the MEMS mirror synchronization process. The experiment is set up and the entire synchronization process is completed within 5 s. Eventually, a one-beam MEMS LiDAR system with the synchronous MEMS mirror pair is set up and a LiDAR with a field of view (FOV) of 60°, angular resolution of 0.2°, and frame rate of 360 Hz is obtained. The experimental results verify the feasibility of the MEMS mirror synchronization method and show a promising potential application prospect for the MEMS LiDAR system.

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Section: Methodsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Fast Synchronization Method of Comb-Actuated MEMS Mirror Pair for LiDAR Application

Qiao

Xia³

et al. 2021

Micromachines

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“…Based on the above, a combination of two uniaxial MEMS mirrors is more readily able to obtain a high angular resolution in a MEMS LiDAR system. In our earlier study, we proposed and set up a semi-coaxial MEMS-based LiDAR system that integrates three uniaxial MEMS mirrors [ 16 ]. In this paper, we specifically reveal a reconfigurable design method on the angular resolution in a separate-axis Lissajous scanning MEMS LiDAR system, in which two uniaxial MEMS mirrors are employed.…”

Section: Introductionmentioning

confidence: 99%

Reconfigurable Angular Resolution Design Method in a Separate-Axis Lissajous Scanning MEMS LiDAR System

Qiao

Xia³

et al. 2022

Micromachines

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MEMS-based LiDAR with a low cost and small volume is a promising solution for 3D measurement. In this paper, a reconfigurable angular resolution design method is proposed in a separate-axis Lissajous scanning MEMS LiDAR system. This design method reveals the influence factors on the angular resolution, including the characteristics of the MEMS mirrors, the laser duty cycle and pulse width, the processing time of the echo signal, the control precision of the MEMS mirror, and the laser divergence angle. A simulation was carried out to show which conditions are required to obtain different angular resolutions. The experimental results of the 0.2° × 0.62° and 0.2° × 0.15° (horizontal × vertical) angular resolutions demonstrate the feasibility of the design method to realize a reconfigurable angular resolution in a separate-axis Lissajous scanning MEMS LiDAR system by employing MEMS mirrors with different characteristics. This study provides a reasonable potential to obtain a high and flexible angular resolution for MEMS LiDAR.

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“…We must, thus, improve the existing research methods and introduce new technical means [ 7 ]. With the maturity of remote sensing, synthetic aperture radar, and LiDAR technologies, it is possible to estimate forest volume at a large scale and with temporal efficiency [ 8 , 9 , 10 , 11 , 12 , 13 ].…”

Section: Introductionmentioning

confidence: 99%

Study on the Estimation of Forest Volume Based on Multi-Source Data

Sun

Jia

et al. 2021

Sensors

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We performed a comparative analysis of the prediction accuracy of machine learning methods and ordinary Kriging (OK) hybrid methods for forest volume models based on multi-source remote sensing data combined with ground survey data. Taking Larix olgensis, Pinus koraiensis, and Pinus sylvestris plantations in Mengjiagang forest farms as the research object, based on the Chinese Academy of Forestry LiDAR, charge-coupled device, and hyperspectral (CAF-LiTCHy) integrated system, we extracted the visible vegetation index, texture features, terrain factors, and point cloud feature variables, respectively. Random forest (RF), support vector regression (SVR), and an artificial neural network (ANN) were used to estimate forest volume. In the small-scale space, the estimation of sample plot volume is influenced by the surrounding environment as well as the neighboring observed data. Based on the residuals of these three machine learning models, OK interpolation was applied to construct new hybrid forest volume estimation models called random forest Kriging (RFK), support vector machines for regression Kriging (SVRK), and artificial neural network Kriging (ANNK). The six estimation models of forest volume were tested using the leave-one-out (Loo) cross-validation method. The prediction accuracies of these six models are better, with RLoo2 values above 0.6, and the prediction accuracy values of the hybrid models are all improved to different extents. Among the six models, the RFK hybrid model had the best prediction effect, with an RLoo2 reaching 0.915. Therefore, the machine learning method based on multi-source remote sensing factors is useful for forest volume estimation; in particular, the hybrid model constructed by combining machine learning and the OK method greatly improved the accuracy of forest volume estimation, which, thus, provides a fast and effective method for the remote sensing inversion estimation of forest volume and facilitates the management of forest resources.

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A semi-coaxial MEMS LiDAR design with independently adjustable detection range and angular resolution

Cited by 17 publications

References 18 publications

Fast Synchronization Method of Comb-Actuated MEMS Mirror Pair for LiDAR Application

Fast Synchronization Method of Comb-Actuated MEMS Mirror Pair for LiDAR Application

Reconfigurable Angular Resolution Design Method in a Separate-Axis Lissajous Scanning MEMS LiDAR System

Study on the Estimation of Forest Volume Based on Multi-Source Data

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