2006
DOI: 10.1109/led.2006.883561
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A Short-Channel SOI RF Power LDMOS Technology With$hboxTiSi_2$Salicide on Dual Sidewalls With Cutoff Frequency$f_T sim hbox19.3 hboxGHz$

Abstract: In this letter, a CMOS-compatible silicon-oninsulator (SOI) RF laterally diffused MOS (LDMOS) technology is proposed based on TiSi 2 salicide with SiO 2 /Si 3 N 4 dual sidewalls. The use of dual sidewalls yields a large process margin for defining drift regions and preventing source-gate silicide bridging. This technology improves the cutoff frequencies and the maximum oscillation frequencies by 27%-42% and 14%-22%, respectively, for a gate length in the range of 0.5-0.25 µm. For the shortest 0.25-µm gate leng… Show more

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Cited by 11 publications
(2 citation statements)
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“…due to its characteristics of low cost, easily integration and competitive Silicon based process [1][2][3][4][5] .…”
Section: Introductionmentioning
confidence: 99%
“…due to its characteristics of low cost, easily integration and competitive Silicon based process [1][2][3][4][5] .…”
Section: Introductionmentioning
confidence: 99%
“…Meanwhile Silicon-on-insulator lateral double-diffused metal-oxide-semiconductors (SOI LDMOSs) can be used as cost-effective and reliable power transistors with good linearity; they have received particular interest for use in radio frequency power amplifiers, a critical component of all wireless system-on-achip applications. [1][2][3] Isolated by a buried box layer, SOI LDMOS field effect transistors (FETs) have benefits such as a reduced leakage current, reduced parasitic capacitance, and reduced cross-talk via the substrate. However, LDMOS devices based on SOI technology have some disadvantages, such as their self-heating effect (SHE) and kink effect.…”
mentioning
confidence: 99%