2008
DOI: 10.1149/1.2908630
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a-Si:H Metal-Semiconductor-Metal (MSM) Photoconductor Detector for Biomolecular Imaging Applications

Abstract: The design, fabrication and operation of a hydrogenated amorphous silicon (a-Si:H) metal-semiconductor-metal (MSM) photoconductor for short wavelength imaging applications is presented. The design of the photoconductor sensor is simpler than that of pin photodiode sensors used in conventional active-matrix arrays owing to the similarity of the photoconductor and thin film transistor fabrication processes and by eliminating the need for a p+ contact layer commonly used in p-i-n diode fabrication. The reported … Show more

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“…16) In addition, being a photoconductor, they have a large leakage current when exposed to light. 17) Polycrystalline silicon (poly-Si) is an alternative material for TFT fabrication. Small grain poly-Si films with a smooth surface make good uniformity devices.…”
Section: Introductionmentioning
confidence: 99%
“…16) In addition, being a photoconductor, they have a large leakage current when exposed to light. 17) Polycrystalline silicon (poly-Si) is an alternative material for TFT fabrication. Small grain poly-Si films with a smooth surface make good uniformity devices.…”
Section: Introductionmentioning
confidence: 99%