2006
DOI: 10.1088/1742-6596/34/1/065
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A silicon-based flexible tactile sensor for ubiquitous robot companion applications

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Cited by 41 publications
(27 citation statements)
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“…Many different approaches have been proposed to fabricate these sensors, most of them are based on piezoresistive (Engel et al 2006; Kane et al 2000;Mei et al 2000;Lomas et al 2004;Kim et al 2006;Wisitsoraat et al 2007; Shan et al 2005) or capacitive (Salo et al 2003;Leineweber et al 2000;Paschen et al 1998;Gray and Fearing 1996;Lee et al 2006; http://pressureprofile.com/products-robotouch) principles, and a few are based on optical (Hellard and Russell 2006) or piezoelectrical transduction (Dahiya et al 2007). Most of these sensors are made using technologies for Micro-ElectroMechanical Systems (MEMS) on silicon (Kane et al 2000;Lomas et al 2004; Salo et al 2003) or on polymers (Engel et al 2006;Kim et al 2006; Lee et al 2006). These technologies are not orientated to large area devices, and many of them are proposed for applications that demand high spatial resolution and good performance in terms of errors, like MIS (Salo et al 2003).…”
Section: Introductionmentioning
confidence: 99%
“…Many different approaches have been proposed to fabricate these sensors, most of them are based on piezoresistive (Engel et al 2006; Kane et al 2000;Mei et al 2000;Lomas et al 2004;Kim et al 2006;Wisitsoraat et al 2007; Shan et al 2005) or capacitive (Salo et al 2003;Leineweber et al 2000;Paschen et al 1998;Gray and Fearing 1996;Lee et al 2006; http://pressureprofile.com/products-robotouch) principles, and a few are based on optical (Hellard and Russell 2006) or piezoelectrical transduction (Dahiya et al 2007). Most of these sensors are made using technologies for Micro-ElectroMechanical Systems (MEMS) on silicon (Kane et al 2000;Lomas et al 2004; Salo et al 2003) or on polymers (Engel et al 2006;Kim et al 2006; Lee et al 2006). These technologies are not orientated to large area devices, and many of them are proposed for applications that demand high spatial resolution and good performance in terms of errors, like MIS (Salo et al 2003).…”
Section: Introductionmentioning
confidence: 99%
“…Recently, several three-axial MEMS (Micro Electro Mechanical Systems) measuring forces in the three dimensions of space have been developed [7], [8], [9], [10]. Except Beccai et al [11], who report some slip detection results with a tactile device for an artificial hand, very little results have been published on the use of three-axial MEMS force sensor in artificial tactile sensing experiments.…”
Section: Introductionmentioning
confidence: 99%
“…Examples of such work includes development of triangular [16] and hexagonal [17] tactile skin patches. Kim et al [18] developed such a skin using silicon micro-machining and packing technology (on a flexible substrate), allowing for the detection of normal and shear forces at high resolution. This skin was shown to be able to effectively measure normal force, hardness, slip and touch.…”
Section: Tactile Sensing For Humanoidsmentioning
confidence: 99%