2003
DOI: 10.1016/s0925-4005(03)00448-9
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A silicon microfluidic ultrasonic separator

Abstract: Ultrasonic standing waves can be used to generate forces on particles within a fluid. Such forces have a number of potential applications in microfluidic devices. This paper describes a device that provides filtration on a microfluidic scale. It is microfabricated and uses ultrasound in the megahertz frequency range to concentrate particles at a node within the flow. It offers the possibility of a functional equivalent of a centrifugal separator for microfluidic systems. It is constructed using silicon and Pyr… Show more

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Cited by 133 publications
(98 citation statements)
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“…To achieve these, various techniques have been developed to be used in microsystems such as optical tweezers [1], magnetophoresis [2], acoustic means [3,4,5] and dielectrophoresis (DEP). Among these, DEP is one of the most popular methods for particle manipulation in microsystems due to (i) its favorable scaling effects [6], (ii) the simplicity of the instrumentation and (iii) its ability to induce both negative and positive forces [7].…”
Section: Introductionmentioning
confidence: 99%
“…To achieve these, various techniques have been developed to be used in microsystems such as optical tweezers [1], magnetophoresis [2], acoustic means [3,4,5] and dielectrophoresis (DEP). Among these, DEP is one of the most popular methods for particle manipulation in microsystems due to (i) its favorable scaling effects [6], (ii) the simplicity of the instrumentation and (iii) its ability to induce both negative and positive forces [7].…”
Section: Introductionmentioning
confidence: 99%
“…Planar USW systems may employ resonators that are larger than a wavelength and contain multiple pressure nodal planes [12,13], but for microfluidic scale devices, a resonant cavity with an axial dimension that is lower than the operating wavelength may be employed [14][15][16]. Such sub-wavelength resonators typically rely for their operation on precise positioning of the pressure node, to which particles will migrate.…”
Section: Introductionmentioning
confidence: 99%
“…The standing wave is maintained by a passive reflecting layer at the far side of the fluid, as shown in Such a resonator may be many wavelengths across, resulting in multiple planes into which cells are gathered [32]. Generally, the fluid layers in the microdevices considered here will be less than a wavelength thick and will gather cells into a single nodal plane [33,34]. An alternative arrangement, the transversal resonator, has been used extensively by Laurell's group in Lund [30,35].…”
Section: Devices For On-chip Ultrasonic Manipulationmentioning
confidence: 99%