A simple and reversible glass–glass bonding method to construct a microfluidic device and its application for cell recovery

Abstract

A simple method, using only neutral detergent for surface cleaning, produces reversible glass–glass bonding to enable use of a glass microfluidic device repeatedly and enable switching a microchannel from closed for cell cultivation to open for cell recovery.

Microelectromechanical Systems (MEMS) for Biomedical Applications

“…Recent years have also witnessed an increase in the use of glass, particularly borosilicate glass, as a material for MEMS fabrication. It possesses exceptional properties that are well suited for this technology, especially in terms of proper hardness for suppressing channel wall deformation, superior optical transparency, chemical, and biological inertness, surpassing optical transparency and insulating properties, high solvent compatibility, and the possibility of surface modification for facilitating liquid flow [75,76]. However, the manufacturing of glass microfluidic devices is significantly expensive and time-consuming, involving complex, multi-step processes that combine different techniques, tools, and equipment [77].…”

Recent Advances in Drug Delivery System Fabricated by Microfluidics for Disease Therapy

“…A typical setup consists of three coaxially assembled basic modules: an injection tube, a transition tube, and a collection tube. Although the cost of glass is low, the process of fabricating chips from glass is time-consuming and labor-intensive [ 24 , 25 , 26 ]. In addition, the extremely impermeable properties of glass and silicon limit on-chip cell culture [ 27 ].…”

Room-temperature bonding of glass chips via PTFE-assisted plasma modification for nanofluidic applications

“…25 Recently, a water-droplet bonding method was developed to realize room-temperature glass bonding via H 2 O as the bonding agent. 6 A pressure endurance of more than 600 kPa within 6 h of bonding was sufficient for cell cultivation, but far from suitable for high-pressure nanofluidic scenarios. Overall, these methods are not cost-effective, nano-structure friendly, or robust enough for the mass production of glass nanofluidics.…”

“…polydimethylsiloxane, PDMS) with low stiffness and water permeability, fused-silica glass substrates are extensively used for nanofluidic devices because they offer overwhelming advantages including chemical inertness, higher values of Young's modulus and light transmission, and can be used to fabricate nanostructures with high resolution and avoid fluid leaching and evaporation. 6,7 To achieve nanofluidic devices successfully, it is paramount to construct and hermetically seal channels via assembling glass substrates with nanostructures. To date, low-temperature bonding has provided a desirable assembly solution with the merits of protecting high-temperature sensitive functional components immobilized in channels such as biomolecules, electrodes, sensors, waveguides, optical components, etc.…”