Microelectromechanical Systems (MEMS) for Biomedical Applications

Abstract

The significant advancements within the electronics miniaturization field have shifted the scientific interest towards a new class of precision devices, namely microelectromechanical systems (MEMS). Specifically, MEMS refers to microscaled precision devices generally produced through micromachining techniques that combine mechanical and electrical components for fulfilling tasks normally carried out by macroscopic systems. Although their presence is found throughout all the aspects of daily life, recent years have witnessed countless research works involving the application of MEMS within the biomedical field, especially in drug synthesis and delivery, microsurgery, microtherapy, diagnostics and prevention, artificial organs, genome synthesis and sequencing, and cell manipulation and characterization. Their tremendous potential resides in the advantages offered by their reduced size, including ease of integration, lightweight, low power consumption, high resonance frequency, the possibility of integration with electrical or electronic circuits, reduced fabrication costs due to high mass production, and high accuracy, sensitivity, and throughput. In this context, this paper aims to provide an overview of MEMS technology by describing the main materials and fabrication techniques for manufacturing purposes and their most common biomedical applications, which have evolved in the past years.

Recent Advancements in Microneedle Technology for Multifaceted Biomedical Applications

“…Microfabrication technology (micro-machining or micro-electromechanical) systems (MEMS) is the most encouraging method used for MNs fabrication and precise application [ 117 ]. MEMS technique exploits various tools and methods to produce smaller 3D structures with the dimensions (sub-centimeter to sub-micrometer).…”

Numerical Approaches for Recovering the Deformable Membrane Profile of Electrostatic Microdevices for Biomedical Applications

“…However, while easy to design and build, they can pump low conductivity fluids [ 20 , 21 , 22 , 23 , 24 , 25 , 26 ]. Research efforts are currently focused on the efficiency of drug administration to be combined with the efficiency of the fluidic device and of the micropumps (implantable and/or removable) based on MEMS technology since positive results in various clinical conditions depend on them [ 27 , 28 ]. Since the release and absorption of drugs strongly depends on pharmacokinetic and metabolic mechanisms, in order to reduce adverse phenomena, research is oriented towards the development of devices capable of controlling the dosage rate from the delivery system [ 29 , 30 ].…”

Analytical Modeling of a New Compliant Microsystem for Atherectomy Operations

“…The joint replacement step is performed by making use of the CSFH (conjugate surfaces flexure hinge) [ 38 ]. The approach has been used to obtain different multi-DoF, multi-hinge devices, such as 3-DoF platforms [ 39 , 40 ] and microgrippers for biosample characterization [ 41 , 42 , 43 , 44 , 45 ] that have also been considered for use in a surgical scenario [ 46 , 47 , 48 ].…”