The paper deals with the problem of modeling and analysis in Simulation Program with Integrated Circuit Emphasis of thermal effects influence on properties of metal–semiconductor field‐effect transistor made of different semiconductor materials, that is, gallium arsenide and silicon carbide. An electrothermal model of the investigated transistors was formulated and experimentally verified. The proper procedure of parameter estimation for the elaborated model was carried out. The evaluation of accuracy and examination of usefulness of the elaborated model have been performed by comparison of measured and calculated devices characteristics. Copyright © 2014 John Wiley & Sons, Ltd.