A Stacked Planar Sensor Concept for Minimally Invasive Plasma Monitoring

Pohle, Dennis; Schulz, Christian; Oberberg, Moritz; Friedrichs, Michael; Serwa, Alexandra; Uhlig, Peter; Oberrath, Jens; Awakowicz, Peter; Rolfes, Ilona

doi:10.23919/apmc.2018.8617552

Cited by 7 publications

(11 citation statements)

References 7 publications

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“…where k = k 2 x + k 2 y and K (ω, k, z, z ) is derived from the integral term in (27). Due to the uniformity of the static equilibrium in the x and y space, the perturbation equations (24) and (25) show the symmetry between k x and k y . Therefore, k = k 2…”

Section: Linearized Kinetic Modelmentioning

confidence: 99%

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Kinetic investigation of the planar Multipole Resonance Probe in the low-pressure plasma

Wang,

Friedrichs,

Oberrath

et al. 2021

Preprint

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Active Plasma Resonance Spectroscopy (APRS) is a well-established plasma diagnostic method: a radio frequency signal is coupled into the plasma via a probe or antenna, excites it to oscillate, and the response is evaluated through a mathematical model. The majority of APRS probes are invasive and perturb the plasma by their physical presence. The planar Multipole Resonance Probe (pMRP) solves this problem: it can be integrated into the chamber wall and minimizes the perturbation. Previous work has studied the pMRP in the frame of the Drude model, but it misses important effects like collision-less damping. In this work, a collision-less kinetic model is developed to further investigate the behavior of the pMRP. This model consists of the Vlasov equation, which is coupled with the Poisson equation under electrostatic approximation. The spectral response of the probe-plasma system is found by calculating the complex admittance. This model covers the kinetic effects and overcomes the limitations of the Drude model.

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Section: Linearized Kinetic Modelmentioning

confidence: 99%

“…Until now, all the presented pMRP spectra are based on the Drude model. In [23][24][25], the spectral response was investigated through the 3D-electromagnetic field simulation with CST Microwave Studio. In [15], the first analytic model was solved by the functional analytic approach.…”

Section: Introductionmentioning

confidence: 99%

Kinetic investigation of the planar Multipole Resonance Probe in the low-pressure plasma

Wang,

Friedrichs,

Oberrath

et al. 2021

Preprint

Self Cite

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show abstract

“…In the past decade, several planar-type APRS probes have been developed, such as the planar multipole resonance probe (pMRP) [10][11][12][13][14][15][16], curling probe [17][18][19], and flat cutoff probe [20][21][22]. These probes can be flatly embedded into the chamber wall or chuck for minimally invasive process monitoring.…”

Section: Introductionmentioning

confidence: 99%

“…I. Previous work has studied the pMRP with the Drude model [10][11][12][13][14][15][16] and collision-less kinetic model [16]. The collision-less kinetic model ignores all collisions, and it only applies to the low-pressure plasma (a few Pa).…”

Section: Introductionmentioning

confidence: 99%

Kinetic investigation of the planar Multipole Resonance Probe under arbitrary pressure

Wang¹,

Friedrichs²,

Oberrath³

et al. 2021

Preprint

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Active plasma resonance spectroscopy (APRS) refers to a class of plasma diagnostic methods that use the ability of plasma to resonate at or near the electron plasma frequency for diagnostic purposes. The planar multipole resonance probe (pMRP) is an optimized realization of APRS.It has a non-invasive structure and allows simultaneous measurement of electron density, electron temperature, and electron-neutral collision frequency. Previous work has investigated the pMRP through the Drude model and collision-less kinetic model. The Drude model misses important kinetic effects such as collision-less kinetic damping. The collision-less kinetic model is able to capture pure kinetic effects. However, it is only applicable to the low-pressure plasma. To further study the behavior of the pMRP, we develop a collisional kinetic model in this paper, which applies to arbitrary pressure. In this model, the kinetic equation is coupled to the Poisson equation under the electrostatic approximation. The real part of the general admittance is calculated to describe the spectral response of the probe-plasma system. Both collision-less kinetic damping and collisional damping appear in the spectrum. This model provides a possibility to calculate the electron density, electron temperature, and electron-neutral collision frequency from the measurements.

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“…In [22], a prototype was tested in a double inductively coupled argon plasma as a proof-of-concept study. Further design improvements, including significantly increased high-temperature resistance, were presented in [24] and [25]. Moreover, recent advances in the mathematical description of the sensor [26] enable-in contrast to an arbitrary resonant structure-a correlation of the observed resonances to the prevailing electron density in a quantitative manner.…”

mentioning

confidence: 99%

The Planar Multipole Resonance Probe: A Minimally Invasive Monitoring Concept for Plasma-Assisted Dielectric Deposition Processes

Pohle

Schulz

Oberberg

et al. 2020

IEEE Trans. Microwave Theory Techn.

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In this article, a novel minimally invasive approach to plasma monitoring in the challenging environment of dielectric deposition processes based on the planar multipole resonance probe (pMRP) is presented. By placing the sensor on the plasmaremote side of a dielectric substrate to be coated, perturbations of the process due to its presence can be significantly reduced. Since the electric field of the sensor is able to penetrate dielectric layers, a plasma supervision through the substrate is enabled. To investigate the effect of increasing coating thicknesses on the measurement performance for a broad spectrum of materials and plasma conditions, the results of extensive 3-D full-wave simulations performed with CST Microwave Studio are evaluated. Finally, real-time monitoring results of an argon-oxygen plasma during a sputter deposition with aluminum oxide on a polyethylene terephthalate (PET) film substrate together with a comparison to external process parameters are presented. The results demonstrate both the applicability of the proposed concept and its insensitivity to additional dielectric coatings.

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A Stacked Planar Sensor Concept for Minimally Invasive Plasma Monitoring

Cited by 7 publications

References 7 publications

Kinetic investigation of the planar Multipole Resonance Probe in the low-pressure plasma

Kinetic investigation of the planar Multipole Resonance Probe in the low-pressure plasma

Kinetic investigation of the planar Multipole Resonance Probe under arbitrary pressure

The Planar Multipole Resonance Probe: A Minimally Invasive Monitoring Concept for Plasma-Assisted Dielectric Deposition Processes

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