2001
DOI: 10.1109/58.920696
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A standing wave-type noncontact linear ultrasonic motor

Abstract: In this study, a novel standing wave-type noncontact linear ultrasonic motor is proposed and analyzed. This linear ultrasonic motor uses a properly controlled ultrasonic standing wave to levitate and drive a slider. A prototype of the motor was constructed by using a wedgeshaped aluminum stator, which was placed horizontally and driven by a multilayer PZT vibrator. The levitation and motion of the slider were observed. Assuming that the driving force was generated by the turbulent acoustic streaming in the bou… Show more

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Cited by 36 publications
(3 citation statements)
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“…Moreover, magnetic levitation cannot always be utilised for delicate objects due to strong magnetic flux. Consequently, there is considerable interest in developing new techniques for free suspension of delicate objects 1,2,3 .…”
Section: A Backgroundmentioning
confidence: 99%
“…Moreover, magnetic levitation cannot always be utilised for delicate objects due to strong magnetic flux. Consequently, there is considerable interest in developing new techniques for free suspension of delicate objects 1,2,3 .…”
Section: A Backgroundmentioning
confidence: 99%
“…Hu et al have reported a noncontact linear ultrasonic motor utilizing a standing wave vibration, in which a wedgeshaped rectangular plate bolted to a multilayer lead zirconate titanate (PZT) vibrator is used as a stator. 17) The levitated solid object on the vibrating plate is linearly transported along the length direction only in one direction by the acoustic streaming induced between the plate and the movable object. In this paper, we propose a noncontact ultrasonic motor with two flexural standing wave vibration disks.…”
Section: Introductionmentioning
confidence: 99%
“…In the USM, the rotor is driven by friction forces between the rotor and stator. The friction force is generated by the ultrasonic wave travelling or standing in the stator of USM [8][9][10][11][12]. For liquids, there are two common mechanisms of transportation, one is ejection, and the other is ultrasonic streaming.…”
Section: Introductionmentioning
confidence: 99%