Abstract. Cu 6 PS 5 I-based thin films are deposited onto silicate-glass substrates using magnetron sputtering. Their chemical compositions are determined with the aid of energy-dispersive X-ray spectroscopy. Changes in the Raman spectra of the Cu 6 PS 5 I-based thin films with respect to the spectra typical for crystalline Cu 6 PS 5 I are discussed. Optical absorption spectra and refractive indices for the films with different Cu contents are studied. Decrease in the energy pseudogap and the Urbach energy is observed with increasing Cu content, accompanied by increase in the refractive index. Electrical conductivity of the Cu 6 PS 5 I-based thin films is revealed to increase nonlinearly with increasing copper concentration.