A study of nitrogen implantation in aluminium—a comparison of experimental results and computer simulation

Sanghera, H.K.; Sullivan, J.L.; Saied, S.O.

doi:10.1016/s0169-4332(98)00618-7

Cited by 18 publications

(4 citation statements)

References 19 publications

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“…For such applications, deep nitrogen diffusion into subsurface layers is appropriate [29]. Due to the limited implantation depth of nitrogen ions, deep nitriding can thus only be achieved at sufficiently high temperatures [28][29][30]. During low- Similar observations were made during the present study.…”

Section: Reactive Ion Beam Etching With Nitrogenmentioning

confidence: 51%

“…In general, aluminium surface modification via nitrogen ion implantation is favorable for a number of technological applications like piezoelectric materials for surface acoustic wave devices or barrier layers in semiconductors [27,28]. For such applications, deep nitrogen diffusion into subsurface layers is appropriate [29].…”

Section: Reactive Ion Beam Etching With Nitrogenmentioning

confidence: 99%

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Improvement of the optical properties after surface error correction of aluminium mirror surfaces

Ulitschka

Bauer

Frost

et al. 2021

J. Eur. Opt. Soc.-Rapid Publ.

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Ion beam finishing techniques of aluminium mirrors have a high potential to meet the increasing demands on applications of high-performance mirror devices for visible and ultraviolet spectral range. Reactively driven ion beam machining using oxygen and nitrogen gases enables the direct figure error correction up to 1 μm machining depth while preserving the initial roughness. However, the periodic turning mark structures, which result from preliminary device shaping by single-point diamond turning, often limit the applicability of mirror surfaces in the short-periodic spectral range. Ion beam planarization with the aid of a sacrificial layer is a promising process route for surface smoothing, resulting in successfully reduction of the turning mark structures. A combination with direct surface smoothing to perform a subsequent improvement of the microroughness is presented with a special focus on roughness evolution, chemical composition, and optical surface properties. As a result, an ion beam based process route is suggested, which allows almost to recover the reflective properties and an increased long-term stability of smoothed aluminium surfaces.

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Section: Reactive Ion Beam Etching With Nitrogenmentioning

confidence: 51%

Section: Reactive Ion Beam Etching With Nitrogenmentioning

confidence: 99%

Improvement of the optical properties after surface error correction of aluminium mirror surfaces

Ulitschka

Bauer

Frost

et al. 2021

J. Eur. Opt. Soc.-Rapid Publ.

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“…In this regard, ion implantation is one of the prospective ways for changing chemical and physical properties in the near-surface part of metals by the formation of nitride phases. [5][6][7][8] It has been reported that forming tantalum nitride (TaN) is more difficult when applied by the ion implantation technique which is a very promising technique to improve the surface characteristics of materials and can be used to detect other generate deficiencies and chemical species in target materials. [9][10][11][12][13] Tantalum and tantalum nitride have a wide industrial range of applications.…”

Section: Introductionmentioning

confidence: 99%

Microstructure and corrosion resistance of tantalum after nitrogen ion implantation

Ramezani

Hantehzadeh

Ghoranneviss

et al. 2016

Corrosion Engineering, Science and Technology

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This paper investigates the effect of nitrogen ion implantation on surface structure as well as resistance against tantalum corrosion. Bulk Ta surface was implanted with 30 keV nitrogen ions at a temperature of 100°C with doses between 1 × 10 17 and 1 × 10 18 ions/cm 2 . The implanted samples were characterised by atomic force microscopy, X-ray diffraction analyses and the corrosion test to identify structural, compositional and electrochemical changes at various doses. The experimental results indicate the formation of hexagonal tantalum nitride (TaN 0.43 ), in addition to the fact that by increasing the ion dose, nitrogen atoms occupy more interstitial spaces in the target crystal, a case which can significantly improve corrosion resistance. The maximum extent in the improvement of the micro hardness was 75% and the reduction in the corrosion current was 83%. According to scanning electronic microscopy and corrosion results, in the dose of 1 × 10 18 ions/cm 2 the highest corrosion resistance was received against the H 2 SO 4 corroding media.

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“…Hence, it is necessary to improve the surface properties of aluminum and its alloy. Among the possible surface treatment techniques, nitrogen implantation has been proposed [3][4][5][6][7][8]. In this way, an aluminum nitride (AlN) layer is formed and previous studies have shown that the nanohardness and frictional properties of aluminum can be improved.…”

Section: Introductionmentioning

confidence: 99%

The Mechanical Property of TiN Film Deposited on N+-Implanted Aluminum by Magnetron Sputtering

Cai

Liu²,

Li³

et al. 2005

KEM

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The effect of a AlN gradient interlayer on the surface mechanical properties was investigated by nano-indentation for the TiN film on N+-implanted Al substrate. The AlN interlayer, 80nm thick measured by Auger Electron Spectrometer (AES), was formed by high energy N+-implantation prior to magnetron sputtering the TiN film in our custom designed multifunctional ion implanter. The nanohardness of N+-implanted aluminum was 450HV at extremely small depth, but quickly decreased to a constant value (65HV). The hardness and Young’s modulus of the TiN film on two different substrates, one with and the other without N+-implantation, kept almost constant up to a small depth of 200nm, and then decreased to the values of the Al substrate with increasing indentation depth, but with a lower decreasing rate for the N+-implanted system. It was found from the load-displacement curves that the interfaces cracked when the indentation load was 38mN for the N+-implanted system, while 18mN for the unimplanted system. Therefore the N+- implantation improved the surface mechanical properties significantly.

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A study of nitrogen implantation in aluminium—a comparison of experimental results and computer simulation

Cited by 18 publications

References 19 publications

Improvement of the optical properties after surface error correction of aluminium mirror surfaces

Improvement of the optical properties after surface error correction of aluminium mirror surfaces

Microstructure and corrosion resistance of tantalum after nitrogen ion implantation

The Mechanical Property of TiN Film Deposited on N+-Implanted Aluminum by Magnetron Sputtering

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