Cu 2 O is a direct and narrow band-gap material; hence, it serves as an important candidate material for applications such as solar cells. In this study, copper (Cu) metal was used as a target and the reactive sputtering method was used to deposit cuprous oxide (Cu 2 O) and cupric oxide (CuO) thin films on indium tin oxide (ITO) glass. The formation of Cu 2 O and CuO thin films was controlled by varying oxidation conditions, such as controlling the deposition atmosphere (called the O 2 ratio). The microstructure, crystalline orientation, and optical properties of Cu 2 O and CuO thin films were measured using X-ray diffraction and optical spectroscopy, respectively. The results for the deposited thin films indicated that the formation of thin films as Cu 2 O and CuO phases was controlled by the flow rate of oxygen during the deposition process. In addition, the (αhv) n -hν curve plot was used to find the optical energy band gap of the Cu 2 O and CuO thin films. Moreover, we found that the crystalline phase and morphology of the deposited thin films affected the properties of the spectral response. This study provides a reference for the possible exploration and application of new, high-performance thin-film photovoltaic solar cells.