2015
DOI: 10.1177/0954405415611357
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A study of ultra-precision ball rotating displacement measurement using laser focus deviation probes

Abstract: An ultra-precision ball rotating displacement measurement setup based on laser focus deviation was presented. The setup is capable of measuring ultra-precision ball rotating displacement at nanometer sensitivity. The experiment results indicated that the method has high repeatability and potentially with high throughput. A dual-probe setup is also studied to evaluate diameter variation in a ball with errors introduced by misalignment, while spindle radial vibration being automatically eliminated. Optical probe… Show more

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Cited by 2 publications
(3 citation statements)
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“…Sun built a highprecision rotary measuring instrument [5]; Chen designed a high-precision cylindrical profile measurement device [6]; Chen proposed a positioning linear scanning method based on small-size cylinders [7]. Due to the application to different occasions, it is difficult to realize the cylindricity detection by roundness meter measurement method for all the shaft systems, and in-situ measurement becomes an important means to detect cylindricity at present [2,8].…”
Section: Introductionmentioning
confidence: 99%
“…Sun built a highprecision rotary measuring instrument [5]; Chen designed a high-precision cylindrical profile measurement device [6]; Chen proposed a positioning linear scanning method based on small-size cylinders [7]. Due to the application to different occasions, it is difficult to realize the cylindricity detection by roundness meter measurement method for all the shaft systems, and in-situ measurement becomes an important means to detect cylindricity at present [2,8].…”
Section: Introductionmentioning
confidence: 99%
“…For these reasons, many researches have been studied for rotation error motion and roundness measurement techniques by various methods using non-tactile type sensing such as optical sensors and these are demanded ultra-high-precision measurement accuracy more and more. 14…”
Section: Introductionmentioning
confidence: 99%
“…For these reasons, many researches have been studied for rotation error motion and roundness measurement techniques by various methods using non-tactile type sensing such as optical sensors and these are demanded ultra-high-precision measurement accuracy more and more. [1][2][3][4] Rotation error motion or roundness measurements are generally performed using runout data. As shown in Figure 1, the runout data include not only rotation error motions, but also unwanted error signals from roundness and setting errors.…”
Section: Introductionmentioning
confidence: 99%