A laboratory-scale chemical vapor deposition (CVD) reactor was used to perform "continuous" Hf doping experiments while the surface of a single-crystal Ni alloy was being aluminized to form an aluminide (-NiAl) coating matrix for 45 minutes at 1150°C. The continuous doping procedure, in which HfCl 4 and AlCl 3 were simultaneously introduced with H 2 , required a high HfCl 4 /AlCl 3 ratio (Ͼϳ0.6) to cause the precipitation of Hf-rich particles (ϳ0.1 m) at grain boundaries of the coating layer, with the overall Hf concentration of ϳ0.05 to 0.25 wt pct measured in the coating layer by glow-discharge mass spectroscopy (GDMS). Below this ratio, Hf did not incorporate as a dopant into the growing coating layer from the gas phase, as the coating matrix appeared to be "saturated" with other refractory elements partitioned from the alloy substrate. In comparison, the Hf concentration in the aluminide coating layer formed on pure Ni was in the range of ϳ0.1 wt pct, which was close to the solubility of Hf estimated for bulk NiAl. Interestingly, the segregation of Hf and the formation of a thin ␥Ј-Ni 3 Al layer (ϳ0.5 m) at the coating surface were consistently observed for both the alloy and pure-Ni substrates. The formation of the thin ␥Ј-Ni 3 Al layer was attributed to an increase in the elastic strain of the -NiAl phase, associated with the segregation of Hf as well as other refractory alloying elements at the coating surface. This phenomenon also implied that the coating layer was actually growing at the interface between the ␥Ј-Ni 3 Al layer and the -NiAl coating matrix, not at the gas/coating interface, during the early stage of the coating growth.