2021
DOI: 10.1016/j.optlastec.2021.107352
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A survey on the grating based optical position encoder

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Cited by 46 publications
(13 citation statements)
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“…As stated in [35] a grating based optical encoder is the industry choice when displacement and position measurements are needed for fabrication and testing in precision machinery. So the design of the test rig takes aim of the use of a grating based optical encoder.…”
Section: Mechanical Design Of Test Rigmentioning
confidence: 99%
“…As stated in [35] a grating based optical encoder is the industry choice when displacement and position measurements are needed for fabrication and testing in precision machinery. So the design of the test rig takes aim of the use of a grating based optical encoder.…”
Section: Mechanical Design Of Test Rigmentioning
confidence: 99%
“…The common initial resolutions of the laser interferometers are about 0.32 μm or 0.16 μm, depending on the optical structure [ 2 ] ( Table S1, Supplementary Material ). The initial resolution of the laser interferometer is several times higher than that of a grating-based encoder system [ 3 ], and laser interferometers also have the feature of error reduction [ 4 , 5 , 6 ]. Therefore, the interferometry−based encoders have high potential in precision positioning.…”
Section: Introductionmentioning
confidence: 99%
“…On the other hand, grating interferometers are preferred in scenarios where environmental conditions cannot be precisely controlled [13][14][15][16]. For instance, in the case of precision machine tools, grating interferometers are commonly employed to measure workpiece processing [17][18][19]. The real time measurement is also needed in practical production [20].…”
Section: Introductionmentioning
confidence: 99%