2023
DOI: 10.1063/5.0162246
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A survey on the mechanical design for piezo-actuated compliant micro-positioning stages

Bingxiao Ding,
Xuan Li,
Chenglin Li
et al.

Abstract: This paper presents a comprehensive review of mechanical design and synthesis methods for piezo-actuated compliant micro-positioning stages, which play an important role in areas where high precision motion is required, including bio-robotics, precision manufacturing, automation, and aerospace. Unlike conventional rigid-link mechanisms, the motion of compliant mechanisms is realized by using flexible elements, whereby deformation requires no lubrication while achieving high movement accuracy without friction. … Show more

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Cited by 31 publications
(10 citation statements)
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“…When the LUM is powered off, the friction resists external forces, giving the LUM a self-locking characteristic. Compared with piezoelectric actuators [4], the introduction of the friction drive principle * Author to whom any correspondence should be addressed.…”
Section: Introductionmentioning
confidence: 99%
“…When the LUM is powered off, the friction resists external forces, giving the LUM a self-locking characteristic. Compared with piezoelectric actuators [4], the introduction of the friction drive principle * Author to whom any correspondence should be addressed.…”
Section: Introductionmentioning
confidence: 99%
“…In addition to their role in wearable technologies, the proposed soft sleeve actuators (SLAs) exhibit potential in the field of precision engineering. Although piezoelectric actuators (PEAs) are prevalent in micromanipulation systems [24], a variety of soft actuation mechanisms are increasingly being explored for their unique advantages. Notable among these are shape memory alloys [25], dielectric elastomers [26], and Electro active polymer [27],…”
Section: Introductionmentioning
confidence: 99%
“…Concerning this, a modular architecture design is implemented in [ 31 ] to improve the functionality of flexure-based positioning stages by manufacturing reconfigurable design modules separately. It is typically challenging to attain a large workspace, higher bandwidth, and enhanced compactness simultaneously, so a better mechanism design is often required to strike a balance among these conflicting performance parameters [ 32 ].…”
Section: Introductionmentioning
confidence: 99%