A Switched-Inductor Integrated Voltage Regulator With Nonlinear Feedback and Network-on-Chip Load in 45 nm SOI

Power conversion schemes in nanometer CMOS mixed-signal SoCs

“…However, these technologies are more expensive than standard CMOS and are difficult to justify in commercial applications that do not contain RF functions. There have also been proposals to employ on-package air-inductors [23] or bond-wire inductors [24] that feature better quality than on-chip counterparts. However, this requires special packaging consideration, and thus cost, pin count, and integration continues to be a challenge.…”

A 2.5D Integrated Voltage Regulator Using Coupled-Magnetic-Core Inductors on Silicon Interposer

“…Planar spiral or other inductor topologies that can be constructed using the interconnects of a typical CMOS process are too resistive to provide efficient on-chip power conversion at reasonable current densities [8]. The efficient use of surface mount technology (SMT) air-core inductors, which can provide a current density up to 1.7 A/mm , has been successfully demonstrated [5], [9]- [11]. However, the size and discrete nature of these devices hinders the scalability of any IVR incorporating discrete SMT inductors.…”

“…After bottom yoke fabrication, the magnetic vias, where the top and bottom yokes contact, are opened by reactive ion etching (RIE). Following plating seedlayer deposition, copper coils are electroplated through resist masks to a thickness of about 5 . After resist mask and seedlayer removal, 6--thick photoresist (AZ Electronics P4620) is used to encapsulate the coils.…”

“…0018-9200/$31.00 © 2012 IEEE Switched inductor integrated voltage regulators (IVRs) will operate faster than board level VRs, enabling dynamic voltage and frequency scaling (DVFS) on nanosecond time scales [4], [5]. Furthermore, IVRs improve efficiency by enabling power delivery at higher voltages in the packaging, reducing losses in the power delivery network (PDN) and required supply voltage margins.…”

Recovery Act: Integrated DC-DC Conversion for Energy-Efficient Multicore Processors

“…The efficient use of surface mount technology (SMT) air-core inductors, which can provide a current density up to 1.7 A/mm 2 , has been successfully demonstrated [10,12,20,21]. However, the size and discrete nature of these devices hinders the scalability of any IVR incorporating discrete SMT inductors.…”