intuitiveness of the system. [6] Soft robotics represents a promising technology in this field because soft robots are constructed from compliant and flexible materials, resulting in machines that can safely interact with the surrounding environment. [7,8] They have already found applications in several research fields including the creation of biomimetic devices (given that the majority of the animal kingdom is mostly or entirely soft), [9][10][11][12] wearable robots, [13] and medical robots. [14] However, the low elastic modulus of soft materials can limit the interaction forces between the robots and the surgical target. To resolve the paradox of generating large forces from soft devices, stiffening mechanisms can be exploited, [15] such as granular jamming that has been integrated in a soft manipulator in order to effectively apply forces on a desired surgical target. [16] Soft biomedical robots are typically centimeter-scale [17] or larger but the current trend in minimally invasive procedures is to perform surgical tasks through small and remote entry points relative to the surgical target, [18] thus requiring millimeter-scale systems. Prior examples of soft millimeter-scale mechanisms include flexible microactuators for building robotic manipulators and grippers constructed by casting silicone rubber and nylon fibers in micromolds fabricated using electrical discharge machining, [19] soft microtentacles for grasping delicate objects consisting of elastomeric microtubes fabricated with a direct peeling-based soft-lithographic technique, [20] and a soft miniature hand fabricated through casting in micromolds and bonding silicone rubber through excimer light irradiation. [21] The forces that these actuators can exert are restricted to the millinewton range, thus suggested biomedical applications are limited to low-force surgical tasks, such as those performed in retinal surgery [22] and neurosurgery. [23] These limitations motivate the need for new millimeter-scale manufacturing technologies that combine soft materials with precision mechanisms to achieve distal articulation, integrated sensing, and effective force transmission with compliant, back-drivable, and safe devices for minimally invasive surgery.The "pop-up book microelectromechanical systems (MEMS)" manufacturing method creates 3D microstructures based on folding of multilayer rigid-flex laminates, [24] and enables fabrication of highly complex structures with embedded actuation and sensing. [25] Surgical applications of pop-up mechanisms have been proposed as self-assembling force sensors A hybrid manufacturing paradigm is introduced that combines pop-up book microelectromechanical systems (MEMS) manufacturing with softlithographic techniques to produce millimeter-scale mechanisms with embedded sensing and user-defined distributed compliance. This method combines accuracy, flexibility in material selection, scalability, and topological complexity with soft, biocompatible materials and microfluidics, paving the way for applications of soft fluid-p...