A theoretical model for surface-stress piezoresistive microcantilever biosensors with discontinuous layers

Wang, Zheyao; Zhou, Yixin; Wang, Chaonan; Zhang, Qi; Ruan, Wenzhou; Liu, Litian

doi:10.1016/j.snb.2009.02.046

Cited by 5 publications

(1 citation statement)

References 36 publications

(57 reference statements)

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“…Fig.1 shows the schematic illustration of the cross-section of the microcantilever. The geometrical and fabrication parameters are optimized to increase the sensitivity of surface stress change in protein detection [6]. The fabrication of microcantilever starts with a SOI wafer with 100nm-thick ptype (100) top device layer and 400nm-thick buried oxide layer, and the detailed process is published elsewhere [7].…”

Section: A Microcantileversmentioning

confidence: 99%

Label-free detection of p53 antibody using a microcantilever biosensor with piezoresistive readout

Zhou

Wang

Yue³

et al. 2009

2009 IEEE Sensors

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We report the detection of p53 antibody as a biomarker for early-stage cancer diagnosis using a microcantilever biosensor with piezoresistive readout. The accumulation of p53 antibody in human sera is found strongly involved in a variety of human cancers, thus simple and fast detection of the level of p53 antibody is of importance in clinical application. In this work, p53 antigen is immobilized on the surface of the microcantilever as a recognition probe to detect p53 antibody by measuring the deflection of the microcantilever using integrated piezoresistors, which is caused by the changes of the surface stress as a result of the specific bioaffinity between the antigen and the antibody. Quantitative detection of p53 antibody ranging from 20ng/ml to 20μg/ml has been achieved. Compared with conventional ELISA or immunofluorescene assay, the microcantilever sensor has the advantages of labelfree operation, fast detection, and low cost.

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Section: A Microcantileversmentioning

confidence: 99%