This paper describes a high-resolution energy-efficient CMOS temperature sensor, intended for the temperature compensation of MEMS/Quartz frequency references. The sensor is based on silicided poly-silicon thermistors, which are embedded in a Wien-bridge RC filter. When driven at a fixed frequency, the filter exhibits a temperature-dependent phase shift, which is digitized by an energy-efficient continuous-time phase-domain delta-sigma modulator. Implemented in a 0.18µm CMOS technology, the sensor draws 87µA from a 1.8V supply and achieves a resolution of 410µK rms in a 5ms conversion time. This translates into a state-of-the-art resolution FoM of 0.13pJ•K 2. When packaged in ceramic, the sensor achieves an inaccuracy of 0.2°C (3σ) from −40°C to 85°C after a single-point calibration and a correction for systematic non-linearity. This can be reduced to ±0.03°C (3σ) after a 1 st-order fit. In addition, the sensor exhibits low 1/f noise and packaging shift.