A Three-axis Displacement Sensor with Nanometric Resolution

Gao, Wei; Kimura, Akihide

doi:10.1016/j.cirp.2007.05.126

Cited by 91 publications

(58 citation statements)

References 7 publications

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“…The reading head was newly designed and constructed because the grating pitch was reduced to 1 mm, which was one-tenth of that in Ref. [10], for higher measurement resolution of displacement. As can be seen in the figure, two transparent grids were added to bend the diffracted beams with large diffraction angles of 43.28 from the scale and reference gratings.…”

Section: Methodsmentioning

confidence: 99%

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A fast evaluation method for pitch deviation and out-of-flatness of a planar scale grating

Gao

Kimura

2010

CIRP Annals

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Section: Methodsmentioning

confidence: 99%

“…The encoder was based on the principle for measurement of three-axis displacement proposed in Ref. [10]. The reading head was newly designed and constructed because the grating pitch was reduced to 1 mm, which was one-tenth of that in Ref.…”

Section: Methodsmentioning

confidence: 99%

A fast evaluation method for pitch deviation and out-of-flatness of a planar scale grating

Gao

Kimura

2010

CIRP Annals

Self Cite

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“…The two-dimensional digital scale, or the cross grid encoder, uses a grid as a reference artifact [71,72]. Its application to machine tools error calibration can be found in many works [73][74][75][76][77].…”

Section: Measurement Of Artifactsmentioning

confidence: 99%

Indirect Measurement of Volumetric Accuracy for Three-Axis and Five-Axis Machine Tools: A Review

Ibaraki¹,

Knapp²

2012

Int. J. Automation Technol.

226

100

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The volumetric accuracy of machine tools is represented by a map of position and orientation error vectors of the tool over the volume concerned. Numerical compensation for volumetric error is possible in many latest commercial CNCs for machine tools. This paper reviews indirect measurement schemes for machine tool kinematics, in which the tool center position is measured as the superposition of error motions of linear or rotary axes. Each error motion can be separately identified by best-fitting a set of measured tool center positions to the kinematic model of machine tools. Indirect measurement schemes for the kinematics of three orthogonal linear axes, as well as the fiveaxis kinematics with two rotary axes, will be reviewed.

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“…To achieve the maximum benefit from the structured surfaces, application technologies of the micro/nano-structured surfaces have been a fascinating research topic in the last few decades. Structured surfaces have been increasingly demanded in various applications, such as optics [1], solar energy technology [2], bioengineering [3], self-cleaning [4], manufacturing [5,6], and so on [7]. To promote widespread use of structured surfaces, their applications and their mass production, manufacturing technology of structured surfaces for a variety of materials is absolutely essential.…”

Section: Introductionmentioning

confidence: 99%

Investigation of Micro Square Structure Fabrication by Applying Textured Cutting Tool in WEDM

Jian-guo

Zhang

et al. 2015

Micromachines

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This paper studies micro structure fabrication by means of a textured tool cutting edge, which is manufactured by applying the wire cut electrical discharge machining (WEDM). Machining performance of the square structure fabrication on the tool cutting edge is investigated in the WEDM process, and the machining accuracy is explored in experimental analyses. In this proposed method, undesired overcut comes from the discharge between the processing debris and the side wall of the target structure. Furthermore, by applying the textured cutting tool, the target square structure is directly fabricated on the alumina workpiece with just a simple turning process, which verifies the feasibility of the proposed tool cutting edge textured method by applying the WEDM. This technology is expected to become a potential method for the mass production of micro structure surfaces in the future.

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A Three-axis Displacement Sensor with Nanometric Resolution

Cited by 91 publications

References 7 publications

A fast evaluation method for pitch deviation and out-of-flatness of a planar scale grating

A fast evaluation method for pitch deviation and out-of-flatness of a planar scale grating

Indirect Measurement of Volumetric Accuracy for Three-Axis and Five-Axis Machine Tools: A Review

Investigation of Micro Square Structure Fabrication by Applying Textured Cutting Tool in WEDM

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