A three-dimensional electrostatic actuator with a locking mechanism for microcavities on atom chips

Gollasch, Carsten O.; Moktadir, Zakaria; Kraft, Michaël; Trupke, Michael; Eriksson, S.; Hinds, E. A.

doi:10.1088/0960-1317/15/7/006

Cited by 13 publications

(11 citation statements)

References 24 publications

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“…The fabrication process can be made to include integrated actuators for the purposes of tuning and mode selection, avoiding the need for external tuning by thermal or piezoelectric means. 31 They can easily be combined with other silicon-based devices such as those in microfluidics, which are just starting to employ optical tools, 32 and in other lab-on-a-chip applications. In the specific context of atom chips, these cavities can readily be incorporated into the magnetic traps and guides available on current devices, [16][17][18] which are precise enough to allow the transport of atoms in and out of the cavity at will.…”

Section: L ͑3͒mentioning

confidence: 99%

Microfabricated high-finesse optical cavity with open access and small volume

Trupke

Hinds

Eriksson

et al. 2005

Applied Physics Letters

155

145

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We present a microfabricated optical cavity, which combines a very small mode volume with high finesse. In contrast to other micro-resonators, such as microspheres, the structure we have built gives atoms and molecules direct access to the high-intensity part of the field mode, enabling them to interact strongly with photons in the cavity for the purposes of detection and quantum-coherent manipulation. Light couples directly in and out of the resonator through an optical fiber, avoiding the need for sensitive coupling optics. This renders the cavity particularly attractive as a component of a lab-on-a-chip, and as a node in a quantum network. © 2005 American Institute of Physics. ͓DOI: 10.1063/1.2132066͔ High-finesse optical cavities are central to many techniques and devices in atomic physics, 1 optoelectronics, 2 chemistry, 3 and biosensing. 4 As well as selecting spectral and spatial distributions of the classical electromagnetic field, optical cavities make it possible to harness quantum effects for applications in quantum information science. 1,5 For example, it is possible to produce single photons on demand using atoms 6,7 or ions 8 inside a cavity and to create entanglement between those that share a cavity photon. 9-11 Similar ideas are being pursued with quantum dots. 12,13 Microscopic cavities are of particular interest 14 because small volume gives the photon a large field and because they offer the possibility of integration with micro-opto-electro-mechanical systems 15 and atom chips. [16][17][18] Here we present a simple and innovative method for fabricating microscopic, broadly-tuneable, high-finesse cavities. These have the significant new feature that their structure is open, giving an atom, molecule or quantum dot direct access to an antinode of the cavity mode. This structure is therefore ideally suited for detecting small numbers of particles, 19 and miniaturizing quantum devices based on strong dipole-cavity coupling.We have made high-finesse, open optical cavities that operate in length at a range of approximately 20-200 m. Each cavity is formed by a concave micro-mirror and the plane tip of an optical fiber, both coated for reflection, as illustrated in Fig. 1͑a͒. Arrays of concave mirrors are fabricated in silicon by wet-etching isotropically through circular apertures in a lithographic mask using a mixture of HF and HNO 3 in acetic acid. The etch bath in which the wafer is immersed undergoes continuous agitation during the etching process, resulting in an approximately spherical surface profile, as shown in Fig. 1͑b͒. The etch rate and the final morphology of the silicon surface are highly dependent on the agitation and on the concentration of each component in the etchant. 20 Precise control over these factors gives us repeatable surface profiles in the silicon with 6 nm rms roughness. In our first experiment, gold is sputtered onto an array of mirror templates to form a layer 100 nm thick with a surface roughness of 10 nm. The plane mirror of the cavity is a dielectric multilayer, w...

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Section: L ͑3͒mentioning

confidence: 99%

Microfabricated high-finesse optical cavity with open access and small volume

Trupke

Hinds

Eriksson

et al. 2005

Applied Physics Letters

155

145

View full text Add to dashboard Cite

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“…The processing techniques of microtextures include etching, micro electric discharge machining, wire EDM and micro cutting. Gollasch et al [8] revealed that the optical microcavities can be manufactured by etching on atom chips, but the complicated technological process and high manufacturing cost make it difficult to promote. Chen et al [9] worked out 15 µm microtexture in sheet metal using 13 µm electrode, though the electrode is easily eroded and the machined surface has a low quality.…”

Section: Introductionmentioning

confidence: 99%

Surface Microtexture Fabrication and Temperature Gradient Regulation of Micro Wankel Engine

et al. 2019

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Nowadays, micro engine miniaturization is one of the most challenging issues, especially for the design and fabrication of the high-power-density micro Wankel engine. With the decrease of the size of the micro engine, the problem of the heat deformation of the cylinder becomes more serious. In this paper, a micro Wankel engine with microtextures on the outer surface of the cylinder is designed and manufactured to diffuse the heat dissipation and regulate the temperature gradient, so as to increase the power output density. First, a series of finite element simulations are conducted to design a type of ideal surface microtexture. Then, the machining condition is optimized to fabricate microtextures by micro cutting on the cylinder surface by studying the processing parameters. Finally, the performance of the new micro Wankel engine in terms of the temperature gradient regulation and the mechanical power output is tested and compared with that of the un-textured micro engine. The comparison results show that temperature of the textured micro engine was dropped from 185 °C to 125 °C and the mechanical power output increased by 10.74% from that of its un-textured counterpart, verifying the proposed methods for temperature gradient regulation.

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“…MEMS nanopositioning mechanisms for ultra-precision motion applications have been developed by Bergna et al [1], and Chen and Culpepper [2]. Other micro-scale instruments that have been demonstrated include a micro-AFM [3] and an atomic trapping and cooling apparatus [4]. In all of these examples, the main challenge in scaling down the critical dimensions of an instrument is to maintain the same level of operational precision of the equivalent macro-scale instrument.…”

Section: Introductionmentioning

confidence: 99%