A Three-Dimensional Finite Element Analysis Model for SH-SAW Torque Sensors

Abstract

In this paper, a three-dimensional finite element analysis (3D-FEA) model for shear horizontal surface acoustic wave (SH-SAW) torque sensors is presented. Torque sensors play a significant role in various fields to ensure a reliable torque transmission in drivelines. Featuring the advantages of high propagation velocity, large Q-value, and good power capacity, SH-SAW-based torque sensors are promising but very few studies have been carried out. In order to develop a successful sensor, understanding the characteristics of SH-SAWs produced on piezoelectric substrates and torque sensing modes is indispensable. Therefore, in this study, we first investigated the effect on the generation of waves when different Y-cut quartz substrates are engaged. Thereafter, analyses and comparisons regarding the effect on the polarized displacement, wave guidance, and wave mode were conducted for different configurations of wave-guide layer thickness to wavelength ratios (hlayer/λ) and materials. The results showed that Y-cut quartz at an angle close to 36° with a gold (Au) layer varying from hAu/λ = 0.02 to 0.03 thickness could be the most effective configuration for the excitation of SH-SAWs, compared to other combinations using platinum (Pt), titanium (Ti), and silicon dioxide (SiO2). Finally, based on the FEA SH-SAW torque sensor model configured with a Y + 36° quartz substrate and 0.025 λ-thick gold layer, the relationship between the applied torque and sensed voltage was examined, which shows a perfect linearity demonstrating the performance of the sensors.

On the Performance Evaluation of Commercial SAW Resonators by Means of a Direct and Reliable Equivalent-Circuit Extraction

“…Finally, it should be noted that, when having access to highly advanced and expensive manufacturing facilities, finite element method (FEM) simulations can be used to develop a physically based model for SAW design optimization [ 36 , 37 , 38 , 39 ], in order to meet the specific application requirements. On the other hand, when using commercial devices, the user has access to only the information available in the datasheets.…”

A review of piezoelectric MEMS sensors and actuators for gas detection application

“…Moreover, there are basically three common modes of SAWs devices that are extensively utilized for gases and chemicals detection, namely Rayleigh wave mode [ 203 ], Lamb wave mode [ 204 ], and shear horizontal wave mode (SH-SAWs) [ 205 ]. In addition, most of the reported SAW gas and microfluidic sensors are based on the Rayleigh waves mode [ 206 , 207 ], whereas the shear horizontal and Lamb wave SAWs are only suitable for gas sensors, but they are not able to perform the detection in the microfluidic or liquid-based sensing environment due to the fact that the wave propagation in the shear horizontal mode and its displacement is only parallel with the substrate surface, which inhibits the wave vibration into the liquid on the surface [ 181 ].…”

A Review of the Real-Time Monitoring of Fluid-Properties in Tubular Architectures for Industrial Applications

“…In other words, the sound mechanical energy is converted into frictional losses during wave motion in the fluid sample. Shear horizontal surface acoustic waves (SH-SAW) viscosity sensor is similar to the SAW sensor, except for the displacement direction of the wave’s components [ 177 , 178 ]. Both sensors, SAW and SH-SAW, are suitable for biomedical applications, with samples having a small volume of fluid and a low viscosity range.…”