2013
DOI: 10.1088/1674-4926/34/5/054006
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A THz InGaAs/InP double heterojunction bipolar transistor withfmax= 325 GHz and BVCBO= 10.6 V

Abstract: A common-base four finger InGaAs/InP double heterostructure bipolar transistor (DHBT) has been designed and fabricated using triple mesa structure and planarization technology. All processes are on 3-inch wafers. The area of each emitter finger is 1 15 m 2 . The maximum oscillation frequency (f max / is 325 GHz and the breakdown voltage BV CBO is 10.6 V, which are to our knowledge both the highest f max and BV CBO ever reported for InGaAs/InP DHBTs in China. The high speed InGaAs/InP DHBT with a high breakdown… Show more

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Cited by 6 publications
(1 citation statement)
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“…Three mesas are formed through selective wet-etching, the base contact metal is defined by using the self-aligned technique. Ti/Pt/Au is used as the emitter-collector contact, while Pt/Ti/Pt/Au is used as the base contact [15,16]. All metals are formed through deposition and lift-off processes.…”
Section: Methodsmentioning
confidence: 99%
“…Three mesas are formed through selective wet-etching, the base contact metal is defined by using the self-aligned technique. Ti/Pt/Au is used as the emitter-collector contact, while Pt/Ti/Pt/Au is used as the base contact [15,16]. All metals are formed through deposition and lift-off processes.…”
Section: Methodsmentioning
confidence: 99%