A TiNiPd thin film microvalve for high temperature applications

Liu, Y; Kohl, Manfred; Okutsu, Kazutoshi; Miyazaki, S.

doi:10.1016/j.msea.2003.10.369

Cited by 61 publications

(37 citation statements)

References 4 publications

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“…Based on the large displacements and actuation forces possible a number of thin film SMA applications have been developed, i.e. micropumps [2e5], -valves [6,7],-grippers [8,9],-wrappers [10],-cages [11],-mirrors [12] and bi-stable actuators for tactile displays [13].…”

Section: Introductionmentioning

confidence: 99%

High-throughput study of martensitic transformations in the complete Ti–Ni–Cu system

et al. 2012

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Section: Introductionmentioning

confidence: 99%

High-throughput study of martensitic transformations in the complete Ti–Ni–Cu system

et al. 2012

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“…Valves using these alloys can also be built using thin films of the alloys on membranes. 55 One problem with microvalves that are actuated using transfer of thermal energy is that designs cannot be used in applications where high temperatures cannot be tolerated.…”

Section: Active Microvalvesmentioning

confidence: 99%

Fundamentals of Microfluidics Devices

Addae‐Mensah

Wang

Parsa

et al. 2010

Microfluidic Devices in Nanotechnology

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“…[1] In the form of thin films, SMAs are being developed for a variety of applications in micro-electromechanical systems (MEMS). [2] They have been used to fabricate actuator devices, such as micro-pumps, [3,4] micro-valves, [5] and micro-grippers. [6] The martensitic transformation temperature of NiTi shape memory alloys is strongly affected by the compositions.…”

Section: Introductionmentioning

confidence: 99%

On the Super‐Elastic and Phase Transformation of a Novel Ni‐Rich/NiTiCu Bi‐Layer Thin Film

2014

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Shape memory Ni-Ti-based thin films were deposited on glass substrates at room temperature by DC magnetron sputtering system from alloy targets. Two discs of Ti-rich targets (Ni 41 Ti 54 Cu 5 and Ni 47 Ti 53 ) were used to deposit two single-layers with chemical compositions of Ni 45 Ti 50 Cu 5 and Ni 50.8 Ti 49.2 and one bi-layer thin films with different chemical compositions similar to the single layers on glass substrates. The as-deposited Ni-Ti thin films were annealed to transform the amorphous to a crystalline material. Subsequently, the structures, phase transformations, and mechanical properties were characterized using grazing incidence X-ray diffraction (GIXRD), field emission electron microscope (FESEM), electrical resistance, and nanoindentation. The developed bi-layer thin film exhibited a two-step transformation B2 $ R $ B19' during cooling and heating with a narrow thermal hysteresis as compared to the single-layers. Moreover, super-elasticity effect and partial permanent strain appeared in the bi-layer because of composite structure.

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A TiNiPd thin film microvalve for high temperature applications

Cited by 61 publications

References 4 publications

High-throughput study of martensitic transformations in the complete Ti–Ni–Cu system

High-throughput study of martensitic transformations in the complete Ti–Ni–Cu system

Fundamentals of Microfluidics Devices

On the Super‐Elastic and Phase Transformation of a Novel Ni‐Rich/NiTiCu Bi‐Layer Thin Film

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