A Totally Free Flexible Membrane: A Design for Low Electrostatic Actuation MEMS

Segueni, K.; Rollier, A.-S.; Garrec, Loïc Le; Robin, R.; Touati, S.; Kanciurzewski, A.; Buchaillot, L.; Millet, Olivier

doi:10.1109/sensor.2007.4300167

Cited by 5 publications

(4 citation statements)

References 6 publications

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“…The DelfMEMS RF-MEMS switch consists of a gold membrane which is totally free and simply supported by two pillars located on each side of the transmission line [8][9][10]. Figure 1 represents an ohmic series switch where the transmission line is interrupted in order to prevent RF signal transmission.…”

Section: Description Of the Switchmentioning

confidence: 99%

“…Mechanical stop units fixed to the ground plane enable the membrane to move but maintain it in functioning position avoiding too large motion in the x-, y-, z-directions (figure 3). The manufacturing of the totally free membrane is enabled by a process flow based on two sacrificial layers under and above the membrane [8][9][10].…”

Section: Description Of the Switchmentioning

confidence: 99%

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Simulation and optimization of a totally free flexible RF MEMS switch

Lorphelin¹,

Robin²,

Rollier³

et al. 2009

J. Micromech. Microeng.

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This paper presents the principle and the modeling of an innovative RF MEMS switch designed for low voltage applications, especially for mobile phones. This switch is based on a totally free flexible membrane, which is supported by pillars and actuated electrostatically by two pairs of electrodes, enabling two forced states. The main advantage of this structure is the use of a lever effect in order to provide high deflections above the transmission line even with a small gap, which explains why the actuation voltage is small compared to classical MEMS switches. The Euler-Bernoulli beam theory is applied to build an analytical 1D model with boundary conditions, which depend on the type of actuation and if pull-in is reached or not. This model is discretized and solved by the finite difference method. Then, a more accurate 3D finite element method is applied to add corrections to the first model. Once this modeling approach is validated, it is used to determine adequate geometrical parameters for the desired switch specifications. Mechanical characterizations on processed components show a pull-in voltage about 7.5 V, which is in good agreement with simulated values. RF measurements show excellent performances.

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Section: Description Of the Switchmentioning

confidence: 99%

Section: Description Of the Switchmentioning

confidence: 99%

Simulation and optimization of a totally free flexible RF MEMS switch

Lorphelin¹,

Robin²,

Rollier³

et al. 2009

J. Micromech. Microeng.

View full text Add to dashboard Cite

show abstract

“…Following all these criteria, we present first results concerning a new patented electrostatic MEMS switch [3]- [4] and the corresponding fabrication process that allow answering previous design challenges of cell handset applications in terms of low size, low cost, low consumption, high RF performances and reliability, in a parralel way to existing works [5]- [8]. The mechanical structure is based on a totally free flexible membrane and the innovative fabrication process concerns the combination of surface micromachining, low temperature process and no-use of polymer sacrificial layer.…”

Section: Introductionmentioning

confidence: 99%

Totally free-flexible membrane for low voltage MEMS metal contact switch

Segueni¹,

Garrec²,

Rollier³

et al. 2007

2007 European Microwave Integrated Circuit Conference

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This paper presents results concerning an electromechanical DC-contact shunt switch based on a patented totally free-flexible metal membrane combined with an associated low temperature surface micromachining fabrication process. The electrostatic actuation enables an average measured actuation voltage of 9.2V for a 5µm out-of-plane membrane deflection. The switch exhibits low insertion loss (0.32 dB @ 10GHz) with good isolation (>30dB @ 10GHz).

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“…That's why large area have been designed on both membrane and electrodes to maximize the actuation force. Wings of balancing are used to reduce stress concentration at the contacts structure-pillar and also to avoid zipping effect [1]. Small arms of correlation have been designed in order to transmit the movement of one side to another without limiting the deflections magnitude.…”

mentioning

confidence: 99%

A new four states high deflection low actuation voltage electrostatic MEMS switch for RF applications

Robin

Touati²,

Segueni³

et al. 2008

2008 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS

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This paper presents a new electrostatic MEMS (MicroElectroMechanical System) based on a single high reliability totally free flexible membrane. Using four electrodes, this structure enables four states which allowed large deflections (4µm) with low actuation voltage (7,5V). This design presents also a good contact force and improves the restoring force of the structure. As an example of application, a Single Pole Double Throw (SPDT) for 24GHz applications, based on this design, has been simulated.

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A Totally Free Flexible Membrane: A Design for Low Electrostatic Actuation MEMS

Cited by 5 publications

References 6 publications

Simulation and optimization of a totally free flexible RF MEMS switch

Simulation and optimization of a totally free flexible RF MEMS switch

Totally free-flexible membrane for low voltage MEMS metal contact switch

A new four states high deflection low actuation voltage electrostatic MEMS switch for RF applications

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