“…By tailoring the geometrical dimensions, metamaterials can be designed to span broad operating wavelengths, including visible [ 31 , 32 , 33 ], IR [ 34 , 35 , 36 , 37 , 38 , 39 ], terahertz [ 40 , 41 , 42 , 43 , 44 ], and microwave light [ 45 , 46 ]. To provide metamaterials with more flexibility, there are many techniques proposed for tuning mechanisms using MEMS technology [ 47 , 48 , 49 , 50 , 51 , 52 , 53 , 54 ]: liquid crystal [ 55 ], photo-excited [ 56 ], phase-change materials [ 57 , 58 ], thermal annealing [ 59 ], and so on. One important tuning method for metamaterial emitters is the integration of microheaters and metamaterials owing to their high efficiency.…”