A unique ECR broad beam source for thin film processing

Zeuner, Michael; Scholze, Frank; Neumann, H.; Chassé, Thomas; Otto, G.; Roth, D.; Hellmich, Anke; Ocker, B.

doi:10.1016/s0257-8972(01)01144-6

Cited by 35 publications

(24 citation statements)

References 11 publications

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“…Smaller changes in the energy influx are not measurable because of the stochastic fluctuations of the data. Figure 2 Temporal behaviour of temperature and heating power at the active probe during operation of an ion beam source [15,16].…”

Section: Resultsmentioning

confidence: 99%

Energy influx measurements with an active thermal probe in plasma-technological processes

Wiese¹,

Kersten²,

Wiese

et al. 2015

EPJ Tech Instrum

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Many plasma-technological applications are based on plasma wall interaction, which can be characterised by calorimetric probes to measure the energy influx from the plasma to the substrate surface. Passive probes are based on the principle of recording the temperature course during heating and cooling of the probe for calculating the energy influx. The disadvantages of these probes are that the energy influx has to be interrupted by switching off the energy source or by using suitable apertures and by the necessity of knowing the exact heat capacity of the probe. A continuously operating active probe is, therefore, developed which does not need to be calibrated and which compensates the environmental effects as well as the heat conduction by the probe holder. By means of controlled electrical heating the probe is set to a given working temperature and then the energy supply supporting the fixed operating temperature is measured. The energy influx by the plasma is compensated by decreasing the heating power and is directly displayed in J/cm 2 s. Some practical measurements are presented. Even, if the probe is designed as double probe the directionality of the energy influx can be determined.

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Section: Resultsmentioning

confidence: 99%

Energy influx measurements with an active thermal probe in plasma-technological processes

Wiese¹,

Kersten²,

Wiese

et al. 2015

EPJ Tech Instrum

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“…The cantilever coincides with the vertical rotational axis of the turnable platform, so that the target remains at the symmetry axis of the ion beam when the probe is rotated. The beam is provided by a broad-beam ion source with grid system [17,26]. The distance from the beam source to the target is 88 cm.…”

Section: Example Of a Vectorial Force Measurementmentioning

confidence: 99%

An interferometric force probe for beam diagnostics and the study of sputtering

2018

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A novel probe for the measurement of forces exerted by a beam of ions and neutral atoms on a small target is described. The force probe is intended for various applications: First, diagnostics of thruster plumes of electric spacecraft propulsion engines, in particular the determination of the spatial distribution of the momentum in an exhaust beam, and second, the study of sputtering of solid targets by means of the related momentum transfer. The instrument makes use of a sensitive cantilever whose elastic deflection is measured interferometrically along two axes and enables that way a simultaneous measurement of two independent components of the force vector. The present contribution focuses on setup and calibration of the probe. Example measurements with obliquely irradiating ion beams are performed.

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“…The common frequency is 2.45 GHz produced by magnetron tubes in the power range up to 1 kW, e.g. for resonant heating a stationary magnetic field of 0.0875 Tesla is required [14]. In space propulsion also other frequencies are in operation.…”

Section: Ion Source Conceptsmentioning

confidence: 99%

Broad Beam Ion Sources for Electrostatic Space Propulsion and Surface Modification Processes: From Roots to Present Applications

Neumann¹,

Tartz

Scholze

et al. 2007

Contrib. Plasma Phys.

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Ion thrusters or broad beam ion sources are widely used in electrostatic space propulsion and in high-end surface modification processes.A short historical review of the roots of electric space propulsion is given. In the following, we introduce the electrostatic ion thrusters and broad beam ion sources based on different plasma excitation principles and describe the similarities as well as the differences briefly. Furthermore, an overview on source plasma and ion beam characterisation methods is presented. Apart from that, a beam profile modelling strategy with the help of numerical trajectory codes as basis for a special grid system design is outlined. This modelling represents the basis for the adaptation of a grid system for required technological demands. Examples of model validation demonstrate their reliability. One of the main challenges in improvement of ion beam technologies is the customisation of the ion beam properties, e.g. the ion current density profile for specific demands. Methods of an ex-situ and in-situ beam profile control will be demonstrated.Examples for the use of ion beam technologies in space and on earth -the RIT-10 rescue mission of ESA's satellite Artemis, the RIT-22 for BepiColombo mission and the deposition of multilayer stacks for EUVL (Extreme Ultra Violet Lithography) mask blank application are provided in order to illustrate the potential of plasma-based ion beam sources.

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A unique ECR broad beam source for thin film processing

Cited by 35 publications

References 11 publications

Energy influx measurements with an active thermal probe in plasma-technological processes

Energy influx measurements with an active thermal probe in plasma-technological processes

An interferometric force probe for beam diagnostics and the study of sputtering

Broad Beam Ion Sources for Electrostatic Space Propulsion and Surface Modification Processes: From Roots to Present Applications

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