Abstract:The Helium Ion Microscope (HIM) has the capability to image small features with a resolution down to 0.35 nm due to its highly focused gas field ionization source and its small beam-sample interaction volume. In this work, the focused helium ion beam of a HIM is utilized to create nanopores with diameters down to 1.3 nm. It will be demonstrated that nanopores can be milled into silicon nitride, carbon nanomembranes (CNMs) and graphene with well-defined aspect ratio. To image and characterize the produced nanopores, helium ion microscopy and high resolution scanning transmission electron microscopy were used. The analysis of the nanopores' growth behavior, allows inferring on the profile of the helium ion beam.Nanopores in atomically thin membranes can be used for biomolecule analysis, 1 electrochemical storage, 2 as well as for the separation of gases and liquids. 3 All of these applications require a precise control of the size and shape of the nanopores. It was shown that the focused beam of a transmission electron microscope (TEM) is able to create nanopores in membranes of silicon nitride and graphene with diameters down to 2 nm. 4,5 Pores can be further shrunk in a TEM by areal electron impact. 6 However, the preparation of such nanopores in a TEM is time-consuming and is limited to small samples (~3 mm diameter) that fit into the microscope. Focused ion beam tools (FIB) offer more flexibility concerning the sample size and a higher milling speed. Among these FIB tools gallium liquid metal ion sources (LMIS) are widely used, allowing minimum sizes of 3 nm diameter for nanopores. 7 The development of a reliable gas field ionization source (GFIS) type allowed the construction of the helium ion microscope which surpasses the imaging and milling resolution of 9 First studies about milling with helium ions reported sample damage by amorphization and helium implantation during milling on bulk substrates. 10 The latter effect is absent on membranes, where nanopores with diameters of 2.6 nm were milled by HIM. 11 In all these reports, pores were created by single spot exposures. Here we present a different route to create small nanopores in membranes by milling circular patterns. Furthermore we are able to connect the growth of nanopores to the ion beam profile.