2016
DOI: 10.1109/ted.2016.2537370
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A Vapor Phase Self-Assembly of Porphyrin Monolayer as a Copper Diffusion Barrier for Back-End-of-Line CMOS Technologies

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Cited by 14 publications
(12 citation statements)
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“…To measure the power of incident light, a calibrated silicon detector (Thor Laboratories, S130VC) and power meter (Thor Laboratories, PM-100D) were used. 17 To examine any changes in the surface roughness of bare and molecularly treated samples, AFM was used. AFM (Bruker, Dimension ICON) was used in tapping mode on different areas of the samples.…”
Section: ■ Experimental Sectionmentioning
confidence: 99%
“…To measure the power of incident light, a calibrated silicon detector (Thor Laboratories, S130VC) and power meter (Thor Laboratories, PM-100D) were used. 17 To examine any changes in the surface roughness of bare and molecularly treated samples, AFM was used. AFM (Bruker, Dimension ICON) was used in tapping mode on different areas of the samples.…”
Section: ■ Experimental Sectionmentioning
confidence: 99%
“…1(b), the end group (−CH3) of the ZnTPP(OH) molecule is a hydrophobic group. 29 Therefore, the first test to examine the presence of SAM was the CA measurement. The CAs of bare, hydroxylated and SAM passivated Al0.5Ga0.5N films are shown in FIG.…”
Section: Characterization Of Sammentioning
confidence: 99%
“…A high CA of 98° was observed for SAM passivated film, which assured the presence of a hydrophobic layer on the Al0.5Ga0.5N surface. 29 31 Al−OH at 74.01 eV (FIG. 2 (e)), 27,34 HO−Ga at 530.66 eV, 31…”
Section: Characterization Of Sammentioning
confidence: 99%
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“…The detailed molecular preparation is given elsewhere. 21 Zn-TPPOH molecular solute was then dissolved in toluene to form 10 À4 M molecular solution. The cleaned ohmic-contacted GaN samples were then placed in this molecular solution for 8 h (time decided after many optimizations) in air tight conditions to achieve the saturated surface coverage of the molecular monolayer on the sample surface.…”
mentioning
confidence: 99%